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Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack
K. S. Chang, M. L. Green, J. Suehle, J. Hattrick-Simpersb, I. Takeuchi, K. Ohmori, T. Chikyow, S. De Gendt, P. Majhi
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution