TY - JOUR
T1 - Combinatorial molecular layer epitaxy of Hf based phosphor oxides
AU - Arai, N.
AU - Kim, T. W.
AU - Kubota, H.
AU - Matsumoto, Y.
AU - Koinuma, H.
PY - 2002
Y1 - 2002
N2 - A series of MHfO3: Tm (M =Ca, Sr and Ba) composition spread films and superlattices (SLs) were quickly fabricated on SrTiO3 (001) substrate in the molecular layer-by-layer growth using combinatorial pulsed laser deposition (PLD) under in-situ reflection high-energy electron diffraction (RHEED) monitoring. Crystal structures and luminescence properties of composition-spread and SLs were evaluated by the concurrent X-ray diffractometer and cathode luminescence (CL), respectively. CL properties of the films were found strongly dependent on their composition and stacking sequence. Possible effect of the stress due to the film-substrate interaction on the CL property is discussed.
AB - A series of MHfO3: Tm (M =Ca, Sr and Ba) composition spread films and superlattices (SLs) were quickly fabricated on SrTiO3 (001) substrate in the molecular layer-by-layer growth using combinatorial pulsed laser deposition (PLD) under in-situ reflection high-energy electron diffraction (RHEED) monitoring. Crystal structures and luminescence properties of composition-spread and SLs were evaluated by the concurrent X-ray diffractometer and cathode luminescence (CL), respectively. CL properties of the films were found strongly dependent on their composition and stacking sequence. Possible effect of the stress due to the film-substrate interaction on the CL property is discussed.
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M3 - Conference article
AN - SCOPUS:0036059570
SN - 0272-9172
VL - 700
SP - 31
EP - 36
JO - Materials Research Society Symposium Proceedings
JF - Materials Research Society Symposium Proceedings
T2 - Combinatorial and Artificial Intelligence Methods in Materials Science
Y2 - 26 November 2001 through 29 November 2001
ER -