Combinatorial molecular layer epitaxy of Hf based phosphor oxides

N. Arai, T. W. Kim, H. Kubota, Y. Matsumoto, H. Koinuma

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


A series of MHfO3: Tm (M =Ca, Sr and Ba) composition spread films and superlattices (SLs) were quickly fabricated on SrTiO3 (001) substrate in the molecular layer-by-layer growth using combinatorial pulsed laser deposition (PLD) under in-situ reflection high-energy electron diffraction (RHEED) monitoring. Crystal structures and luminescence properties of composition-spread and SLs were evaluated by the concurrent X-ray diffractometer and cathode luminescence (CL), respectively. CL properties of the films were found strongly dependent on their composition and stacking sequence. Possible effect of the stress due to the film-substrate interaction on the CL property is discussed.

Original languageEnglish
Pages (from-to)31-36
Number of pages6
JournalMaterials Research Society Symposium Proceedings
Publication statusPublished - 2002
EventCombinatorial and Artificial Intelligence Methods in Materials Science - Boston, MA, United States
Duration: 2001 Nov 262001 Nov 29


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