@inproceedings{02e75d58044c4d7ab73f48fd263814d6,
title = "Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications",
abstract = "A commercially produced monocrystalline-like epitaxial PZT film is described for piezoelectric MEMS applications. Films with a thickness of 1\ \mu \mathrm{m} to 2\ \mu \mathrm{m} exhibit a typical transverse piezoelectric d31 coefficient of -185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. These films are commercially available for piezoelectric MEMS device development and production.",
keywords = "epitaxial, piezoelectric, PZT, sputtering, thin film",
author = "Ryoma Miyake and Mario Kiuchi and Shinya Yoshida and Shuji Tanaka and Fox, {Glen R.}",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, IFCS-ISAF 2020 ; Conference date: 19-07-2020 Through 23-07-2020",
year = "2020",
month = jul,
doi = "10.1109/IFCS-ISAF41089.2020.9234898",
language = "English",
series = "IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings",
address = "United States",
}