Compact AFM system for rapid and large area surface topography measurement

Bing Feng Ju, Wei Gao, Jim Aoki, Takemi Asai, Satoshi Kiyono

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


This paper presents a prototype compact AFM system, which possesses the capability of rapid and large area surface topography measurement. The motion unit of the new AFM system is a combination of a linear stage and an air-spindle, which makes it distinguished from the typical X-Y motion stage that widely used in conventional AFM. The novel motion unit facilitates the rapid as well as large area scanning. The complex laser-photodiode system in conventional AFM is also replaced by a piezoresistive cantilever that is capable of detecting the cantilever deflection corresponding to the interaction force between the tip and the surface. The performance of this new AFM system is testified by rapid topography measurement of a 3D micro-structure with a sinusoidal grid surface.

Original languageEnglish
Pages (from-to)525-530
Number of pages6
JournalJournal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Issue number5
Publication statusPublished - 2006 Oct


  • Air-spindle
  • Atomic force microscope
  • Linear stage
  • Sinusoidal grid surface
  • Surface topography


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