Fingerprint
Dive into the research topics of 'Compact triangulation sensor realized by bending Si wafer with optical elements at metal hinges'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Compact triangulation sensor realized by bending Si wafer with optical elements at metal hinges
Minora Sasaki, Satoshi Endou, Kazuhiro Hane
Research output: Contribution to journal › Article › peer-review