Abstract
The formation of alloy cluster for Co-Al and Co-Pt system using a plasma-gas-aggregation technique was discussed. It was found that the B2-CoAl clusters of about 12 nm in diameter were formed for a composition range wider than that predicted by the Co-Al phase diagram. The results showed that the monomer absorption with discrete residence time was the dominant mechanism responsible for monodispersive alloy cluster formation.
| Original language | English |
|---|---|
| Pages (from-to) | 834-842 |
| Number of pages | 9 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 20 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2002 May |
| Event | 20th North American Conference on Molecular Beam Epitaxy - Providence, RI, United States Duration: 2001 Oct 1 → 2001 Oct 3 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Electrical and Electronic Engineering