TY - JOUR
T1 - Comparative study on emission characteristics of d.c.- and r.f.-powered Grimm glow discharge plasmas. Use of argon spectral lines
AU - Wagatsuma, Kazuaki
AU - Suzuki, Shigeru
PY - 1997
Y1 - 1997
N2 - Equivalent discharge conditions, where the intensities of the analyte are almost the same between the d.c. and the r.f. power modes, have been investigated in Grimm glow discharge emission spectrometry. The two plasmas have similar emission and sputtering characteristics, enabling the conditions to be found easily. Various emission lines of argon ion are commonly observed from the argon discharges regardless of the power modes. A method to determine the equivalent discharge conditions is suggested, based on intensity analysis of the argon ionic lines.
AB - Equivalent discharge conditions, where the intensities of the analyte are almost the same between the d.c. and the r.f. power modes, have been investigated in Grimm glow discharge emission spectrometry. The two plasmas have similar emission and sputtering characteristics, enabling the conditions to be found easily. Various emission lines of argon ion are commonly observed from the argon discharges regardless of the power modes. A method to determine the equivalent discharge conditions is suggested, based on intensity analysis of the argon ionic lines.
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U2 - 10.1007/s002160050473
DO - 10.1007/s002160050473
M3 - Article
AN - SCOPUS:0009471114
SN - 0937-0633
VL - 358
SP - 581
EP - 584
JO - Analytical and Bioanalytical Chemistry
JF - Analytical and Bioanalytical Chemistry
IS - 5
ER -