Comparison of optical position detectors in a force controlled displacement probe

Wei Gao, Shuichi Dejima, Yoritaka Hosoda, Satoshi Kiyono

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)55-56
Number of pages2
JournalInternational Journal of the Japan Society for Precision Engineering
Issue number1
Publication statusPublished - 1999 Mar


  • Angle, force control
  • Cantilever
  • Displacement
  • Measurement
  • Optical sensor
  • Photo diode
  • Position sensitive device

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