@article{24d1690227154069923f9aafd9e3a79b,
title = "Comparison of optical position detectors in a force controlled displacement probe",
keywords = "Angle, force control, Cantilever, Displacement, Measurement, Optical sensor, Photo diode, Position sensitive device",
author = "Wei Gao and Shuichi Dejima and Yoritaka Hosoda and Satoshi Kiyono",
year = "1999",
month = mar,
language = "English",
volume = "33",
pages = "55--56",
journal = "International Journal of the Japan Society for Precision Engineering",
issn = "0916-782X",
publisher = "Japan Society for Precision Engineering",
number = "1",
}