Computational study on chemical mechanical polishing properties of perovskite oxide abrasive grain

Nobuki Ozawa; Miho Nakamura; Kentaro Kawaguchi; Takeshi Ishikawa; Yuji Higuchi; Momoji Kubo

Computational study on chemical mechanical polishing properties of perovskite oxide abrasive grain

Nobuki Ozawa, Miho Nakamura, Kentaro Kawaguchi, Takeshi Ishikawa, Yuji Higuchi, Momoji Kubo

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	5th World Tribology Congress, WTC 2013
Publisher	Politecnico di Torino (DIMEAS)
Pages	1915-1916
Number of pages	2
ISBN (Electronic)	9781634393522
Publication status	Published - 2014
Event	5th World Tribology Congress, WTC 2013 - Torino, Italy Duration: 2013 Sept 8 → 2013 Sept 13

Publication series

Name	5th World Tribology Congress, WTC 2013
Volume	3

Conference

Conference	5th World Tribology Congress, WTC 2013
Country/Territory	Italy
City	Torino
Period	13/9/8 → 13/9/13

Cite this

@inproceedings{c10aa0b7717744bdae3e3dc2edb80eb5,

title = "Computational study on chemical mechanical polishing properties of perovskite oxide abrasive grain",

author = "Nobuki Ozawa and Miho Nakamura and Kentaro Kawaguchi and Takeshi Ishikawa and Yuji Higuchi and Momoji Kubo",

year = "2014",

language = "English",

series = "5th World Tribology Congress, WTC 2013",

publisher = "Politecnico di Torino (DIMEAS)",

pages = "1915--1916",

booktitle = "5th World Tribology Congress, WTC 2013",

note = "5th World Tribology Congress, WTC 2013 ; Conference date: 08-09-2013 Through 13-09-2013",

}

Ozawa, N, Nakamura, M, Kawaguchi, K, Ishikawa, T, Higuchi, Y & Kubo, M 2014, Computational study on chemical mechanical polishing properties of perovskite oxide abrasive grain. in 5th World Tribology Congress, WTC 2013. 5th World Tribology Congress, WTC 2013, vol. 3, Politecnico di Torino (DIMEAS), pp. 1915-1916, 5th World Tribology Congress, WTC 2013, Torino, Italy, 13/9/8.

Computational study on chemical mechanical polishing properties of perovskite oxide abrasive grain. / Ozawa, Nobuki; Nakamura, Miho; Kawaguchi, Kentaro et al.
5th World Tribology Congress, WTC 2013. Politecnico di Torino (DIMEAS), 2014. p. 1915-1916 (5th World Tribology Congress, WTC 2013; Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Computational study on chemical mechanical polishing properties of perovskite oxide abrasive grain

AU - Ozawa, Nobuki

AU - Nakamura, Miho

AU - Kawaguchi, Kentaro

AU - Ishikawa, Takeshi

AU - Higuchi, Yuji

AU - Kubo, Momoji

PY - 2014

Y1 - 2014

UR - http://www.scopus.com/inward/record.url?scp=84919488295&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84919488295&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84919488295

T3 - 5th World Tribology Congress, WTC 2013

SP - 1915

EP - 1916

BT - 5th World Tribology Congress, WTC 2013

PB - Politecnico di Torino (DIMEAS)

T2 - 5th World Tribology Congress, WTC 2013

Y2 - 8 September 2013 through 13 September 2013

ER -

Computational study on chemical mechanical polishing properties of perovskite oxide abrasive grain

Publication series

Conference

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