@inproceedings{947373f0a792435b8398eb055706696c,
title = "Computer simulation of nano metallic-particle synthesis in an advanced rf inductively coupled plasma",
abstract = "In the present study, the thermofluid field and the electromagnetic field of an advanced RF inductively coupled plasma, which is expected to be utilized for nano metallic-particle synthesis, are investigated. The influence of the operating conditions on the mechanism of the nano metallic-particle synthesis and the finally obtained diameter is clarified by computer simulation.",
author = "Masaya Shigeta and Hideya Nishiyama",
note = "Publisher Copyright: {\textcopyright} 2004 American Institute of Physics.; 3rd International Symposium on Slow Dynamics in Complex Systems ; Conference date: 03-11-2003 Through 08-11-2003",
year = "2004",
month = apr,
day = "30",
doi = "10.1063/1.1764110",
language = "English",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
pages = "174--178",
editor = "Michio Tokuyama and Irwin Oppenheim",
booktitle = "Slow Dynamics in Complex Systems",
}