Conductive optical-fiber STM probe for local excitation and collection of cathodoluminescence at semiconductor surfaces

Luminescence imaging of semiconductor surfaces in nanometric resolution is a key to novel optoelectronic nano-devices, which requires local carrier excitation and local luminescence collection within the nanometric areas at the surfaces. However, there have not been a practical nanospectroscopies applicable to wide range of specimens. STMcathodoluminescence (STM-CL) nanospectroscopy offers both high spatial resolution (of the order of 10 nm) and novel high carrier excitation power (up to ̃1 mW), which enables local luminescence imaging of lessluminescent nano-structures. In this study, we advanced STM-CL technique by introducing a novel optical fiber probe with Cr thin film coating (Cr-FP), which was found to work as a STM probe, as an electron field-emitter for local carrier excitation, and as an alignment-free efficient local STM-CL collector which blinds luminescence after the minority carrier diffusion.