Confocal laser displacement sensor using a micro-machined varifocal mirror

Kenta Nakazawa; Takashi Sasaki; Hiromasa Furuta; Jiro Kamiya; Hideki Sasaki; Toshikazu Kamiya; Kazuhiro Hane

doi:10.1364/AO.56.006911

Confocal laser displacement sensor using a micro-machined varifocal mirror

Kenta Nakazawa, Takashi Sasaki, Hiromasa Furuta, Jiro Kamiya, Hideki Sasaki, Toshikazu Kamiya, Kazuhiro Hane

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

A confocal laser displacement sensor using a micro-machined varifocal mirror is reported. The focal length modulation is a key function of the confocal sensor. The mechanism of the focal length modulation determines the measurement speed and range. Here, we propose application of the micro-machined varifocal mirror for the modulation. The varifocal mirror can realize faster modulation, small size, and low energy consumption for the confocal displacement sensor. The electrostatically actuated varifocal mirror made by single crystalline silicon is used. The working distance of the sensor is designed to be 31 mm. The actuating range at 7 kHz is 310 μm. The linearity error in the actuating range is from −1.1% to 1.2%.

Original language	English
Pages (from-to)	6911-6916
Number of pages	6
Journal	Applied Optics
Volume	56
Issue number	24
DOIs	https://doi.org/10.1364/AO.56.006911
Publication status	Published - 2017 Aug 20

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title = "Confocal laser displacement sensor using a micro-machined varifocal mirror",

abstract = "A confocal laser displacement sensor using a micro-machined varifocal mirror is reported. The focal length modulation is a key function of the confocal sensor. The mechanism of the focal length modulation determines the measurement speed and range. Here, we propose application of the micro-machined varifocal mirror for the modulation. The varifocal mirror can realize faster modulation, small size, and low energy consumption for the confocal displacement sensor. The electrostatically actuated varifocal mirror made by single crystalline silicon is used. The working distance of the sensor is designed to be 31 mm. The actuating range at 7 kHz is 310 μm. The linearity error in the actuating range is from −1.1% to 1.2%.",

author = "Kenta Nakazawa and Takashi Sasaki and Hiromasa Furuta and Jiro Kamiya and Hideki Sasaki and Toshikazu Kamiya and Kazuhiro Hane",

note = "Funding Information: Japan Society for the Promotion of Science (JSPS) KAKENHI (JP17J01997); Ministry of Education, Culture, Sports, Science, and Technology Program for Leading Graduate Schools, Inter-Graduate School Doctoral Degree Program on Global Safety. The authors thank Yoshiaki Kanamori for his useful advice. The varifocal mirror was fabricated in the Micro/Nano Machining Research and Education center, Tohoku University. Publisher Copyright: {\textcopyright} 2017 Optical Society of America.",

year = "2017",

month = aug,

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doi = "10.1364/AO.56.006911",

language = "English",

volume = "56",

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T1 - Confocal laser displacement sensor using a micro-machined varifocal mirror

AU - Nakazawa, Kenta

AU - Sasaki, Takashi

AU - Furuta, Hiromasa

AU - Kamiya, Jiro

AU - Sasaki, Hideki

AU - Kamiya, Toshikazu

AU - Hane, Kazuhiro

N1 - Funding Information: Japan Society for the Promotion of Science (JSPS) KAKENHI (JP17J01997); Ministry of Education, Culture, Sports, Science, and Technology Program for Leading Graduate Schools, Inter-Graduate School Doctoral Degree Program on Global Safety. The authors thank Yoshiaki Kanamori for his useful advice. The varifocal mirror was fabricated in the Micro/Nano Machining Research and Education center, Tohoku University. Publisher Copyright: © 2017 Optical Society of America.

PY - 2017/8/20

Y1 - 2017/8/20

N2 - A confocal laser displacement sensor using a micro-machined varifocal mirror is reported. The focal length modulation is a key function of the confocal sensor. The mechanism of the focal length modulation determines the measurement speed and range. Here, we propose application of the micro-machined varifocal mirror for the modulation. The varifocal mirror can realize faster modulation, small size, and low energy consumption for the confocal displacement sensor. The electrostatically actuated varifocal mirror made by single crystalline silicon is used. The working distance of the sensor is designed to be 31 mm. The actuating range at 7 kHz is 310 μm. The linearity error in the actuating range is from −1.1% to 1.2%.

AB - A confocal laser displacement sensor using a micro-machined varifocal mirror is reported. The focal length modulation is a key function of the confocal sensor. The mechanism of the focal length modulation determines the measurement speed and range. Here, we propose application of the micro-machined varifocal mirror for the modulation. The varifocal mirror can realize faster modulation, small size, and low energy consumption for the confocal displacement sensor. The electrostatically actuated varifocal mirror made by single crystalline silicon is used. The working distance of the sensor is designed to be 31 mm. The actuating range at 7 kHz is 310 μm. The linearity error in the actuating range is from −1.1% to 1.2%.

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JO - Applied Optics

JF - Applied Optics

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ER -

Confocal laser displacement sensor using a micro-machined varifocal mirror

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