TY - GEN
T1 - Confocal laser displacement sensor using MEMS varifocal mirror
AU - Nakazawa, K.
AU - Sasaki, Takashi
AU - Furnia, H.
AU - Kamiya, J.
AU - Sasaki, H.
AU - Kamiya, T.
AU - Hane, K.
N1 - Funding Information:
This study was supported in part by JSPS KAKENHI and G-Safety. The varifocal mirror was fabricated in the Micro/Nano Machining Research and Education center, Tohoku University.
Publisher Copyright:
© 2017 IEEE.
PY - 2017/7/26
Y1 - 2017/7/26
N2 - A confocal laser displacement sensor using a micro-machined varifocal mirror is reported. The focal length modulation is a key function for the sensor. The measurement speed and range depend on the mechanism. In this study, we propose to use the micro-machined varifocal mirror for the mechanism of the focal length modulation in the confocal displacement sensor. The electrostatically actuated varifocal mirror made by silicon was used. The working distance of the displacement sensor is designed to be 31 mm. The measurement range at 7 kHz is 310 μm. The linearity in the full scale range is from -1.5% to 0.85%.
AB - A confocal laser displacement sensor using a micro-machined varifocal mirror is reported. The focal length modulation is a key function for the sensor. The measurement speed and range depend on the mechanism. In this study, we propose to use the micro-machined varifocal mirror for the mechanism of the focal length modulation in the confocal displacement sensor. The electrostatically actuated varifocal mirror made by silicon was used. The working distance of the displacement sensor is designed to be 31 mm. The measurement range at 7 kHz is 310 μm. The linearity in the full scale range is from -1.5% to 0.85%.
KW - Confocal laser displacement sensor
KW - Resonant vibration
KW - Varifocal mirror
UR - http://www.scopus.com/inward/record.url?scp=85029371517&partnerID=8YFLogxK
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U2 - 10.1109/TRANSDUCERS.2017.7994498
DO - 10.1109/TRANSDUCERS.2017.7994498
M3 - Conference contribution
AN - SCOPUS:85029371517
T3 - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 2139
EP - 2142
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Y2 - 18 June 2017 through 22 June 2017
ER -