Consistent processing and measurement procedure on micro cutting

Tetsuya Naruse; Kazu Andou; Yutaka Kameyama; Masayoshi Mizutani; Yoshihiro Uehara; Kazutoshi Katahira; Weimin Lin; Chikako Sasaki; Hitoshi Ohmori

Consistent processing and measurement procedure on micro cutting

Tetsuya Naruse, Kazu Andou, Yutaka Kameyama, Masayoshi Mizutani, Yoshihiro Uehara, Kazutoshi Katahira, Weimin Lin, Chikako Sasaki, Hitoshi Ohmori

Research Center for Green X-Tech

RIKEN

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

Miniaturization and weight reduction of portable audiovisual equipments, palmtop computers and mobile phones is being urgently pursued, increasing the demand for miniaturized and highly functional electronic devices, optical devices and mechanical components. A demand for high dimensional accuracy in parts comprising these products is also on the rise. Therefore, tool and processing using it are asked for high accuracy. In this research, we developed the system by which production of micro-tool and processing of work-piece are consistent. It carries an ELID grinding system and measurement equipment on a plane in precision 4-axis processing machine. It became production of a tool with detailed high accuracy is possible, and the deflection of a tool can be suppressed to 30nm.

Original language	English
Publication status	Published - 2007
Event	4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007 - Fukuoka, Japan Duration: 2007 Nov 7 → 2007 Nov 9

Conference

Conference	4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007
Country/Territory	Japan
City	Fukuoka
Period	07/11/7 → 07/11/9

Keywords

Desk-top machine tools
Micro cutting
Micro mechanical fabrication
Micro tool

Cite this

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title = "Consistent processing and measurement procedure on micro cutting",

abstract = "Miniaturization and weight reduction of portable audiovisual equipments, palmtop computers and mobile phones is being urgently pursued, increasing the demand for miniaturized and highly functional electronic devices, optical devices and mechanical components. A demand for high dimensional accuracy in parts comprising these products is also on the rise. Therefore, tool and processing using it are asked for high accuracy. In this research, we developed the system by which production of micro-tool and processing of work-piece are consistent. It carries an ELID grinding system and measurement equipment on a plane in precision 4-axis processing machine. It became production of a tool with detailed high accuracy is possible, and the deflection of a tool can be suppressed to 30nm.",

keywords = "Desk-top machine tools, Micro cutting, Micro mechanical fabrication, Micro tool",

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TY - CONF

T1 - Consistent processing and measurement procedure on micro cutting

AU - Naruse, Tetsuya

AU - Andou, Kazu

AU - Kameyama, Yutaka

AU - Mizutani, Masayoshi

AU - Uehara, Yoshihiro

AU - Katahira, Kazutoshi

AU - Lin, Weimin

AU - Sasaki, Chikako

AU - Ohmori, Hitoshi

PY - 2007

Y1 - 2007

N2 - Miniaturization and weight reduction of portable audiovisual equipments, palmtop computers and mobile phones is being urgently pursued, increasing the demand for miniaturized and highly functional electronic devices, optical devices and mechanical components. A demand for high dimensional accuracy in parts comprising these products is also on the rise. Therefore, tool and processing using it are asked for high accuracy. In this research, we developed the system by which production of micro-tool and processing of work-piece are consistent. It carries an ELID grinding system and measurement equipment on a plane in precision 4-axis processing machine. It became production of a tool with detailed high accuracy is possible, and the deflection of a tool can be suppressed to 30nm.

AB - Miniaturization and weight reduction of portable audiovisual equipments, palmtop computers and mobile phones is being urgently pursued, increasing the demand for miniaturized and highly functional electronic devices, optical devices and mechanical components. A demand for high dimensional accuracy in parts comprising these products is also on the rise. Therefore, tool and processing using it are asked for high accuracy. In this research, we developed the system by which production of micro-tool and processing of work-piece are consistent. It carries an ELID grinding system and measurement equipment on a plane in precision 4-axis processing machine. It became production of a tool with detailed high accuracy is possible, and the deflection of a tool can be suppressed to 30nm.

KW - Desk-top machine tools

KW - Micro cutting

KW - Micro mechanical fabrication

KW - Micro tool

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M3 - Paper

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T2 - 4th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2007

Y2 - 7 November 2007 through 9 November 2007

ER -

Consistent processing and measurement procedure on micro cutting

Abstract

Conference

Keywords

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