TY - GEN
T1 - Continuous membrane deformable mirror for adaptive optics using bimorph spring
AU - Wu, T.
AU - Akiyama, Masayuki
AU - Hane, Kazuhiro
PY - 2011/9/1
Y1 - 2011/9/1
N2 - We propose, design and fabricate here a novel electrostatically actuated continuous membrane deformable mirror for the next generation astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A 3.4mm × 3.4 mm deformable mirror with a underlying 4 × 4 electrode array is fabricated by utilizing plasma activated bonding and the subsequent all-dry release process. The fabricated deformable mirror deformed 3.8μm at 130V.
AB - We propose, design and fabricate here a novel electrostatically actuated continuous membrane deformable mirror for the next generation astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A 3.4mm × 3.4 mm deformable mirror with a underlying 4 × 4 electrode array is fabricated by utilizing plasma activated bonding and the subsequent all-dry release process. The fabricated deformable mirror deformed 3.8μm at 130V.
KW - Deformable mirror
KW - adaptive optics
UR - http://www.scopus.com/inward/record.url?scp=80052117879&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80052117879&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2011.5969726
DO - 10.1109/TRANSDUCERS.2011.5969726
M3 - Conference contribution
AN - SCOPUS:80052117879
SN - 9781457701573
T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
SP - 598
EP - 601
BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Y2 - 5 June 2011 through 9 June 2011
ER -