Control of guided resonance in a photonic crystal slab using microelectromechanical actuators

Yoshiaki Kanamori; Takashi Kitani; Kazuhiro Hane

doi:10.1063/1.2431452

Control of guided resonance in a photonic crystal slab using microelectromechanical actuators

Yoshiaki Kanamori, Takashi Kitani, Kazuhiro Hane

Tohoku University

Research output: Contribution to journal › Article › peer-review

83 Citations (Scopus)

Abstract

A wavelength-selective variable-reflection filter is proposed, in which a guided resonance in a photonic crystal (PC) slab is controlled by microelectronic mechanical actuators. A narrow wavelength response is generated by the guided resonance of PC slab, and the variable optical response at the wavelength is caused by evanescent-wave coupling to a substrate. The coupling is controlled by microelectromechanical actuators. The proposed filter has been fabricated by silicon micromachining and the mechanism has been confirmed.

Original language	English
Article number	031911
Journal	Applied Physics Letters
Volume	90
Issue number	3
DOIs	https://doi.org/10.1063/1.2431452
Publication status	Published - 2007

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10.1063/1.2431452

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title = "Control of guided resonance in a photonic crystal slab using microelectromechanical actuators",

abstract = "A wavelength-selective variable-reflection filter is proposed, in which a guided resonance in a photonic crystal (PC) slab is controlled by microelectronic mechanical actuators. A narrow wavelength response is generated by the guided resonance of PC slab, and the variable optical response at the wavelength is caused by evanescent-wave coupling to a substrate. The coupling is controlled by microelectromechanical actuators. The proposed filter has been fabricated by silicon micromachining and the mechanism has been confirmed.",

author = "Yoshiaki Kanamori and Takashi Kitani and Kazuhiro Hane",

note = "Funding Information: A part of this work was supported by New Energy and Industrial Technology Development Organization (NEDO) of Japan and performed at Venture Business Laboratory in Tohoku University, Japan.",

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AU - Kanamori, Yoshiaki

AU - Kitani, Takashi

AU - Hane, Kazuhiro

N1 - Funding Information: A part of this work was supported by New Energy and Industrial Technology Development Organization (NEDO) of Japan and performed at Venture Business Laboratory in Tohoku University, Japan.

PY - 2007

Y1 - 2007

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AB - A wavelength-selective variable-reflection filter is proposed, in which a guided resonance in a photonic crystal (PC) slab is controlled by microelectronic mechanical actuators. A narrow wavelength response is generated by the guided resonance of PC slab, and the variable optical response at the wavelength is caused by evanescent-wave coupling to a substrate. The coupling is controlled by microelectromechanical actuators. The proposed filter has been fabricated by silicon micromachining and the mechanism has been confirmed.

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Control of guided resonance in a photonic crystal slab using microelectromechanical actuators

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