Control performance of interactions between reactive plasma jet and substrate

Hideya Nishiyama; Takehiko Sato; Shota Niikura; Genta Chiba; Hidemasa Takana

doi:10.1143/JJAP.45.8085

Control performance of interactions between reactive plasma jet and substrate

Hideya Nishiyama, Takehiko Sato, Shota Niikura, Genta Chiba, Hidemasa Takana

Tohoku University

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

When a nonequilibrium Ar/N₂ plasma jet is impinging onto a substrate, the effects of operating pressure, applied magnetic field on the radiation intensity from nitrogen radicals, heat flux into the substrate, behaviors of the plasma jet impinging onto the substrate are experimentally clarified. The constant-value control of radiation intensity, substrate heat flux, jet axis deviation, and jet width fluctuation is achieved for high-quality material processes by a proportional plus integral (PI) control method with the suppression of the unstable fluctuarion of plasma jet.

Original language	English
Pages (from-to)	8085-8089
Number of pages	5
Journal	Japanese Journal of Applied Physics
Volume	45
Issue number	10 B
DOIs	https://doi.org/10.1143/JJAP.45.8085
Publication status	Published - 2006 Oct 21

Keywords

Control
Magnetic field
Nitriding
Operating pressure
Plasma jet
Substrate
Unstable behavior

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10.1143/JJAP.45.8085

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title = "Control performance of interactions between reactive plasma jet and substrate",

abstract = "When a nonequilibrium Ar/N2 plasma jet is impinging onto a substrate, the effects of operating pressure, applied magnetic field on the radiation intensity from nitrogen radicals, heat flux into the substrate, behaviors of the plasma jet impinging onto the substrate are experimentally clarified. The constant-value control of radiation intensity, substrate heat flux, jet axis deviation, and jet width fluctuation is achieved for high-quality material processes by a proportional plus integral (PI) control method with the suppression of the unstable fluctuarion of plasma jet.",

keywords = "Control, Magnetic field, Nitriding, Operating pressure, Plasma jet, Substrate, Unstable behavior",

author = "Hideya Nishiyama and Takehiko Sato and Shota Niikura and Genta Chiba and Hidemasa Takana",

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T1 - Control performance of interactions between reactive plasma jet and substrate

AU - Nishiyama, Hideya

AU - Sato, Takehiko

AU - Niikura, Shota

AU - Chiba, Genta

AU - Takana, Hidemasa

PY - 2006/10/21

Y1 - 2006/10/21

N2 - When a nonequilibrium Ar/N2 plasma jet is impinging onto a substrate, the effects of operating pressure, applied magnetic field on the radiation intensity from nitrogen radicals, heat flux into the substrate, behaviors of the plasma jet impinging onto the substrate are experimentally clarified. The constant-value control of radiation intensity, substrate heat flux, jet axis deviation, and jet width fluctuation is achieved for high-quality material processes by a proportional plus integral (PI) control method with the suppression of the unstable fluctuarion of plasma jet.

AB - When a nonequilibrium Ar/N2 plasma jet is impinging onto a substrate, the effects of operating pressure, applied magnetic field on the radiation intensity from nitrogen radicals, heat flux into the substrate, behaviors of the plasma jet impinging onto the substrate are experimentally clarified. The constant-value control of radiation intensity, substrate heat flux, jet axis deviation, and jet width fluctuation is achieved for high-quality material processes by a proportional plus integral (PI) control method with the suppression of the unstable fluctuarion of plasma jet.

KW - Control

KW - Magnetic field

KW - Nitriding

KW - Operating pressure

KW - Plasma jet

KW - Substrate

KW - Unstable behavior

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EP - 8089

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 10 B

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Control performance of interactions between reactive plasma jet and substrate

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Keywords

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