Correlation between current-voltage characteristics and dislocations evaluated with submicrometer Schottky contacts on n-GaN grown by metalorganic chemical vapor deposition

Kenji Shiojima, Tetsuya Suemitsu

Research output: Contribution to journalArticlepeer-review

27 Citations (Scopus)
Original languageEnglish
Pages (from-to)698-705
Number of pages8
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Issue number2
Publication statusPublished - 2003

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