Cracking of saturated hydrocarbon gas molecular beam for carbonization of Si(001) surface

Tatsuo Yoshinobu; Hideaki Mitsui; Yoichiro Tarui; Takashi Fuyuki; Hiroyuki Matsunami

Cracking of saturated hydrocarbon gas molecular beam for carbonization of Si(001) surface

Tatsuo Yoshinobu, Hideaki Mitsui, Yoichiro Tarui, Takashi Fuyuki, Hiroyuki Matsunami

MEN - Biomedical Engineering

Kyoto University

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Carbonization of Si(001) surfaces by saturated hydrocarbon gas molecular beams in a high vacuum was carried out employing a thermal cracking technique. In the case of C₃H₈ and C₂H₆, the Si surfaces were carbonized at 750°C with a cracking temperature of 1300°C, and 3C-SiC layers were obtained. Decomposition of C₃H₈ by cracking was observed in quadrupole mass analyzer (QMA) measurements. In the case of C₂H₆, the effect of cracking was less obvious, and decomposed species were not observed except for H₂ in QMA measurements. In the case of CH₄, no effect of cracking was observed. This result seems to be related to the difference in the bond strengths of molecules.

Original language	English
Pages (from-to)	L 1580-L 1582
Journal	Japanese Journal of Applied Physics
Volume	31
Issue number	11 B
Publication status	Published - 1992

Cite this

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title = "Cracking of saturated hydrocarbon gas molecular beam for carbonization of Si(001) surface",

abstract = "Carbonization of Si(001) surfaces by saturated hydrocarbon gas molecular beams in a high vacuum was carried out employing a thermal cracking technique. In the case of C3H8 and C2H6, the Si surfaces were carbonized at 750°C with a cracking temperature of 1300°C, and 3C-SiC layers were obtained. Decomposition of C3H8 by cracking was observed in quadrupole mass analyzer (QMA) measurements. In the case of C2H6, the effect of cracking was less obvious, and decomposed species were not observed except for H2 in QMA measurements. In the case of CH4, no effect of cracking was observed. This result seems to be related to the difference in the bond strengths of molecules.",

author = "Tatsuo Yoshinobu and Hideaki Mitsui and Yoichiro Tarui and Takashi Fuyuki and Hiroyuki Matsunami",

year = "1992",

language = "English",

volume = "31",

pages = "L 1580--L 1582",

journal = "Japanese Journal of Applied Physics",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

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TY - JOUR

T1 - Cracking of saturated hydrocarbon gas molecular beam for carbonization of Si(001) surface

AU - Yoshinobu, Tatsuo

AU - Mitsui, Hideaki

AU - Tarui, Yoichiro

AU - Fuyuki, Takashi

AU - Matsunami, Hiroyuki

PY - 1992

Y1 - 1992

N2 - Carbonization of Si(001) surfaces by saturated hydrocarbon gas molecular beams in a high vacuum was carried out employing a thermal cracking technique. In the case of C3H8 and C2H6, the Si surfaces were carbonized at 750°C with a cracking temperature of 1300°C, and 3C-SiC layers were obtained. Decomposition of C3H8 by cracking was observed in quadrupole mass analyzer (QMA) measurements. In the case of C2H6, the effect of cracking was less obvious, and decomposed species were not observed except for H2 in QMA measurements. In the case of CH4, no effect of cracking was observed. This result seems to be related to the difference in the bond strengths of molecules.

AB - Carbonization of Si(001) surfaces by saturated hydrocarbon gas molecular beams in a high vacuum was carried out employing a thermal cracking technique. In the case of C3H8 and C2H6, the Si surfaces were carbonized at 750°C with a cracking temperature of 1300°C, and 3C-SiC layers were obtained. Decomposition of C3H8 by cracking was observed in quadrupole mass analyzer (QMA) measurements. In the case of C2H6, the effect of cracking was less obvious, and decomposed species were not observed except for H2 in QMA measurements. In the case of CH4, no effect of cracking was observed. This result seems to be related to the difference in the bond strengths of molecules.

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M3 - Article

AN - SCOPUS:0026944297

SN - 0021-4922

VL - 31

SP - L 1580-L 1582

JO - Japanese Journal of Applied Physics

JF - Japanese Journal of Applied Physics

IS - 11 B

ER -

Cracking of saturated hydrocarbon gas molecular beam for carbonization of Si(001) surface

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