@article{23651e5607c14a6aa547d5a975f417d5,
title = "Crossover between surface science and precision engineering",
keywords = "AES, CVD, Diamond, In-situ observation, Photon-induced reactions, Plasma-enhanced process, Real-time monitoring, RHEED, Silicon, Synchrotron radiation, Thin film growth, UPS, XPS",
author = "Yuji Takakuwa and Shuichi Ogawa",
year = "2014",
month = may,
doi = "10.2493/jjspe.80.429",
language = "English",
volume = "80",
pages = "429--432",
journal = "Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "5",
}