Crossover between surface science and precision engineering

Yuji Takakuwa, Shuichi Ogawa

Research output: Contribution to journalReview articlepeer-review

Original languageEnglish
Pages (from-to)429-432
Number of pages4
JournalJournal of the Japan Society for Precision Engineering
Volume80
Issue number5
DOIs
Publication statusPublished - 2014 May

Keywords

  • AES
  • CVD
  • Diamond
  • In-situ observation
  • Photon-induced reactions
  • Plasma-enhanced process
  • Real-time monitoring
  • RHEED
  • Silicon
  • Synchrotron radiation
  • Thin film growth
  • UPS
  • XPS

Cite this