The origin of high uniaxial magnetic asnisotropy in FeCoB thin films was investigated by focusing on the changes in FeCo crystal distortion and alignment. The films were prepared by facing targets sputtering using Fe 68.8Co27.2B4 alloy targets and examined with X-ray diffraction (XRD) analysis. Preparation of a Ru underlayer showed reduction of coercivity Hc from 130 to 14 Oe and developed remarkably high-anisotropy field Hκ of 500 Oe. FeCo(110) of the FeCoB film with a Ru underlayer revealed an oblique crystal growth and a preferred orientation in the film plane that possessed (110)  along the easy axis. FeCo(110) lattice spacing has 0.5% expansion along the easy axis, which induces that the magnetoelastic energy Eelastic of 3.8×105 erg/cm3 exists along the easy axis due to an inverse magnetostriction effect. The estimated Hκ from the.
- Crystalline texture
- High-anisotropy field
- Stress-induced magnetic anisotropy