@inproceedings{18e074485955402a94d9c84aff5807fb,
title = "Crystallographic influence on nanomechanics of ultra-thin silicon resonators",
abstract = "The influence of crystallographic orientations on nanomechanical properties of 50-nm-thick single crystalline silicon resonators was investigated by examining the effects of surface treatments, such as flash-heating and O2 adsorption on the mechanical quality factors (Q-factors) and resonant frequencies. Cantilevers with [100], [110] and [111] orientations were examined in this work. A 1500-nm-thick [100] cantilever array was also studied for comparison. The loss mechanisms in energy dissipation were discussed in terms of support loss, thermoelastic loss, as well as surface loss. The results obtained in this study provide an insight into the understanding of surface effects on nanomechanics of resonating elements, and provide design guidelines for future's nanoengineered devices for ultimate sensing.",
keywords = "Crystallization, Crystallography, Energy dissipation, Mechanical factors, Nanoscale devices, Q factor, Resonant frequency, Silicon, Surface treatment, Thermoelasticity",
author = "Wang, {D. F.} and Takahito Ono and Masayoshi Esashi",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/SENSOR.2003.1215321",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "336--339",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
note = "12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
}