This study reports piezoelectric properties and crystallographic microstructures of aluminium nitride (AlN, wurtzite structure) thin films on 50 μm thick stainless steel foil. The transverse piezoelectric coefficient d31f and e31f of 10 pm thick AlN films were estimated as -1.42 0.08 μm/V and -0.48 0.03 C/m2 from a tip displacement of the piezoelectric cantilevers. Dielectric constant s33 was measured as 10.5 1.0. An electron beam diffraction pattern by a high-resolution transmission electron microscope and x-ray diffraction pattern showed that abundance ratio of the orientation such as <101>, <102> and <103> of AlN crystal on stainless steel foils increased with increasing thickness.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 2016 Dec 14|
|Event||16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2016 - Paris, France|
Duration: 2016 Dec 6 → 2016 Dec 9