TY - GEN
T1 - Cycloidal scanning with MEMS micro mirror for an omnidirectional long range LiDAR
AU - Kobayashi, Takeaki
AU - Sasaki, Takashi
AU - Hane, Kazuhiro
N1 - Publisher Copyright:
© 2019 IEEE.
PY - 2019/7
Y1 - 2019/7
N2 - An omnidirectional MEMS mirror for long range LiDAR is proposed on the basis of cycloidal scan assuming application for the self-driving vehicles. The proposed cycloidal scan is effective for adjusting scanning speed depending on distance. A 'Pantograph type' omnidirectional mirror is designed and fabricated using single crystalline silicon. The mirror has two electrostatically driven actuators. Voltages are applied for respective axes at two different phases and an optical angle of about 2.5 degrees is obtained for circular scans at a resonant frequency of 2281 Hz in the initial experiment.
AB - An omnidirectional MEMS mirror for long range LiDAR is proposed on the basis of cycloidal scan assuming application for the self-driving vehicles. The proposed cycloidal scan is effective for adjusting scanning speed depending on distance. A 'Pantograph type' omnidirectional mirror is designed and fabricated using single crystalline silicon. The mirror has two electrostatically driven actuators. Voltages are applied for respective axes at two different phases and an optical angle of about 2.5 degrees is obtained for circular scans at a resonant frequency of 2281 Hz in the initial experiment.
UR - http://www.scopus.com/inward/record.url?scp=85077608987&partnerID=8YFLogxK
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U2 - 10.1109/OMN.2019.8925249
DO - 10.1109/OMN.2019.8925249
M3 - Conference contribution
AN - SCOPUS:85077608987
T3 - International Conference on Optical MEMS and Nanophotonics
SP - 142
EP - 143
BT - OMN 2019 - 2019 International Conference on Optical MEMS and Nanophotonics, Proceedings
PB - IEEE Computer Society
T2 - 2019 International Conference on Optical MEMS and Nanophotonics, OMN 2019
Y2 - 28 July 2019 through 1 August 2019
ER -