@article{5f09e6bb7f9b46a68f92cf2c3e3d5bf3,
title = "Degradation of polymers for resist using microbubbles on ozonized water",
keywords = "Environmental, Microbubble, Ozone, Photoresist, Removal",
author = "Kohei Matsuura and Takashi Nishiyama and Eriko Sato and Masashi Yamamoto and Masayoshi Takahashi and Kunihiko Koike and Hideo Horibe",
year = "2015",
month = aug,
day = "19",
doi = "10.2494/photopolymer.28.299",
language = "English",
volume = "28",
pages = "299--301",
journal = "Journal of Photopolymer Science and Technology",
issn = "0914-9244",
publisher = "Tokai University",
number = "2",
}