Degradation of polymers for resist using microbubbles on ozonized water

Kohei Matsuura, Takashi Nishiyama, Eriko Sato, Masashi Yamamoto, Masayoshi Takahashi, Kunihiko Koike, Hideo Horibe

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)
Original languageEnglish
Pages (from-to)299-301
Number of pages3
JournalJournal of Photopolymer Science and Technology
Issue number2
Publication statusPublished - 2015 Aug 19


  • Environmental
  • Microbubble
  • Ozone
  • Photoresist
  • Removal

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