TY - JOUR
T1 - Demolding in ultraviolet nanoimprinting assisted by a nanoscale lubricating fluid layer of condensed alternative chlorofluorocarbon
AU - Nakagawa, Masaru
AU - Kaneko, Shu
AU - Ito, Shunya
N1 - Funding Information:
The authors thank Mr. Toshimichi Iwai and Mr. Sumito Harada (Saitama R&D Center, Advantest Corporation) for their assistance of CD-SEM measurements. This work was supported in part by the Core Research Evolutional Science and Technology (CREST) of Japan Science and Technology Agency (JST) and the Nano-Macro Materials, Devices and System Research Alliance (MEXT).
Publisher Copyright:
© 2016 The Chemical Society of Japan.
PY - 2016/7
Y1 - 2016/7
N2 - We demonstrated that demolding in ultraviolet (UV) nanoimprinting was assisted by a nanoscale lubricating fluid layer of a liquefied 1,1,1,3,3-pentafluoropropane (PFP) gas. UV-curable Resin A composed of glycerol 1,3-diglycerolate diacrylate with low PFP absorption showed low surface roughness of 22-nm line-and-space imprint patterns with the smallest line edge roughness (LER) value of 3σ = 1.8 nm. As the molar ratio of 1,6-hexanediol diacrylate with large PFP absorption was increased in the UV-curable resin, the morphological characteristics worsened. Although thin cured films of Resin A possessed a large surface free energy of 57.6mJ m-2 Resin A could be used for step-and-repeat UV nanoimprinting with bare and fluorinated silica molds. Quartz crystal microbalance measurements suggested that a PFP adsorption layer was formed at a film surface of uncured Resin A upon exposure to PFP gas and functioned as a nanoscale lubricating fluid layer during UV nanoimprinting.
AB - We demonstrated that demolding in ultraviolet (UV) nanoimprinting was assisted by a nanoscale lubricating fluid layer of a liquefied 1,1,1,3,3-pentafluoropropane (PFP) gas. UV-curable Resin A composed of glycerol 1,3-diglycerolate diacrylate with low PFP absorption showed low surface roughness of 22-nm line-and-space imprint patterns with the smallest line edge roughness (LER) value of 3σ = 1.8 nm. As the molar ratio of 1,6-hexanediol diacrylate with large PFP absorption was increased in the UV-curable resin, the morphological characteristics worsened. Although thin cured films of Resin A possessed a large surface free energy of 57.6mJ m-2 Resin A could be used for step-and-repeat UV nanoimprinting with bare and fluorinated silica molds. Quartz crystal microbalance measurements suggested that a PFP adsorption layer was formed at a film surface of uncured Resin A upon exposure to PFP gas and functioned as a nanoscale lubricating fluid layer during UV nanoimprinting.
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U2 - 10.1246/bcsj.20160107
DO - 10.1246/bcsj.20160107
M3 - Article
AN - SCOPUS:84979574324
SN - 0009-2673
VL - 89
SP - 786
EP - 793
JO - Bulletin of the Chemical Society of Japan
JF - Bulletin of the Chemical Society of Japan
IS - 7
ER -