Density measurement of molten CaF2 by an electrostatic levitator

I. Minato; H. Fukuyama; T. Ishikawa; P. F. Paradis; J. Yu; S. Yoda

doi:10.1007/s10765-006-0087-5

Density measurement of molten CaF₂ by an electrostatic levitator

I. Minato, H. Fukuyama, T. Ishikawa, P. F. Paradis, J. Yu, S. Yoda

Center for Mineral Processing and Metallurgy (CMPM)

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

High-quality single crystalline calcium fluoride (CaF₂) has been of considerable practical concern as an optical lens to an excimer laser stepper in the deep-ultraviolet region due to its excellent transparency. Highly accurate thermophysical properties of molten CaF₂ are essential as input data for a numerical simulation of the crystal growth process. The density of molten CaF₂ has been successfully determined in the stable and undercooled liquid states (1600-1820 K) with an electrostatic levitator. The temperature dependence of the density of molten CaF₂ is given by ρkg· m^-3 = 3580-0.63T(±1.6%). The coefficient of cubical expansion of molten CaF₂ has been determined to be β/K^-1 = 1/5683 - T.

Original language	English
Pages (from-to)	1173-1180
Number of pages	8
Journal	International Journal of Thermophysics
Volume	27
Issue number	4
DOIs	https://doi.org/10.1007/s10765-006-0087-5
Publication status	Published - 2006 Jul

Keywords

CaF
Density
Electrostatic levitator
Undercooled liquid

ASJC Scopus subject areas

Condensed Matter Physics

Access to Document

10.1007/s10765-006-0087-5

Cite this

@article{9668a7c44c874804908a252fd4ee4f46,

title = "Density measurement of molten CaF2 by an electrostatic levitator",

abstract = "High-quality single crystalline calcium fluoride (CaF2) has been of considerable practical concern as an optical lens to an excimer laser stepper in the deep-ultraviolet region due to its excellent transparency. Highly accurate thermophysical properties of molten CaF2 are essential as input data for a numerical simulation of the crystal growth process. The density of molten CaF2 has been successfully determined in the stable and undercooled liquid states (1600-1820 K) with an electrostatic levitator. The temperature dependence of the density of molten CaF2 is given by ρkg· m-3 = 3580-0.63T(±1.6%). The coefficient of cubical expansion of molten CaF2 has been determined to be β/K-1 = 1/5683 - T.",

keywords = "CaF, Density, Electrostatic levitator, Undercooled liquid",

author = "I. Minato and H. Fukuyama and T. Ishikawa and Paradis, {P. F.} and J. Yu and S. Yoda",

year = "2006",

month = jul,

doi = "10.1007/s10765-006-0087-5",

language = "English",

volume = "27",

pages = "1173--1180",

journal = "International Journal of Thermophysics",

issn = "0195-928X",

publisher = "Springer New York",

number = "4",

}

TY - JOUR

T1 - Density measurement of molten CaF2 by an electrostatic levitator

AU - Minato, I.

AU - Fukuyama, H.

AU - Ishikawa, T.

AU - Paradis, P. F.

AU - Yu, J.

AU - Yoda, S.

PY - 2006/7

Y1 - 2006/7

N2 - High-quality single crystalline calcium fluoride (CaF2) has been of considerable practical concern as an optical lens to an excimer laser stepper in the deep-ultraviolet region due to its excellent transparency. Highly accurate thermophysical properties of molten CaF2 are essential as input data for a numerical simulation of the crystal growth process. The density of molten CaF2 has been successfully determined in the stable and undercooled liquid states (1600-1820 K) with an electrostatic levitator. The temperature dependence of the density of molten CaF2 is given by ρkg· m-3 = 3580-0.63T(±1.6%). The coefficient of cubical expansion of molten CaF2 has been determined to be β/K-1 = 1/5683 - T.

AB - High-quality single crystalline calcium fluoride (CaF2) has been of considerable practical concern as an optical lens to an excimer laser stepper in the deep-ultraviolet region due to its excellent transparency. Highly accurate thermophysical properties of molten CaF2 are essential as input data for a numerical simulation of the crystal growth process. The density of molten CaF2 has been successfully determined in the stable and undercooled liquid states (1600-1820 K) with an electrostatic levitator. The temperature dependence of the density of molten CaF2 is given by ρkg· m-3 = 3580-0.63T(±1.6%). The coefficient of cubical expansion of molten CaF2 has been determined to be β/K-1 = 1/5683 - T.

KW - CaF

KW - Density

KW - Electrostatic levitator

KW - Undercooled liquid

UR - http://www.scopus.com/inward/record.url?scp=33748995142&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33748995142&partnerID=8YFLogxK

U2 - 10.1007/s10765-006-0087-5

DO - 10.1007/s10765-006-0087-5

M3 - Article

AN - SCOPUS:33748995142

SN - 0195-928X

VL - 27

SP - 1173

EP - 1180

JO - International Journal of Thermophysics

JF - International Journal of Thermophysics

IS - 4

ER -