High-quality single crystalline calcium fluoride (CaF2) has been of considerable practical concern as an optical lens to an excimer laser stepper in the deep-ultraviolet region due to its excellent transparency. Highly accurate thermophysical properties of molten CaF2 are essential as input data for a numerical simulation of the crystal growth process. The density of molten CaF2 has been successfully determined in the stable and undercooled liquid states (1600-1820 K) with an electrostatic levitator. The temperature dependence of the density of molten CaF2 is given by ρkg· m-3 = 3580-0.63T(±1.6%). The coefficient of cubical expansion of molten CaF2 has been determined to be β/K-1 = 1/5683 - T.
|Number of pages||8|
|Journal||International Journal of Thermophysics|
|Publication status||Published - 2006 Jul|
- Electrostatic levitator
- Undercooled liquid
ASJC Scopus subject areas
- Condensed Matter Physics