Density profile transition and high-energy electron transport in a magnetically expanding radio frequency plasma

Kazuma Emoto, Kazunori Takahashi, Yoshinori Takao

Research output: Contribution to journalArticlepeer-review

Abstract

The density profile transition and high-energy electron transport in a magnetically expanding radio frequency (RF) plasma were investigated using particle-in-cell and Monte Carlo collision techniques, where both the plasma source and the diffusion region were simulated self-consistently. The simulation results show that the density profile changes from center-peaked to bimodal plasma with increasing magnetic field strength, where bimodal plasma was observed in previous experiments. Then, the density profile transition is discussed with respect to ionization, electron temperature, and high-energy electron density. This indicates that electrons were heated by the RF field and transported radially inward across magnetic field lines. The moving distance of high-energy electrons is explained by an electron-neutral elastic collision. Therefore, the density formation depends on where the electrons are heated and how far the high-energy electrons are transported by an elastic collision, implying the longer existing time of high-energy electrons that move radially inward away from the RF antenna.

Original languageEnglish
Article number013509
JournalPhysics of Plasmas
Volume30
Issue number1
DOIs
Publication statusPublished - 2023 Jan 1

ASJC Scopus subject areas

  • Condensed Matter Physics

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