Deposition and microfabrication of Gd-doped CeO2 for micro SOFC operating at low temperature

Tomokazu Takahashi, Fumitada Iguchi, Hiroo Yugami, Masayoshi Esashi, Shuji Tanaka

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


This paper describes the fabrication technology of micro solid oxide fuel cells (SOFC) using Gddoped CeO2 (GDC) solid oxide electrolyte. A GDC membrane is made extremely thin (-300 nm thick) for low temperature operation, and a microheater is formed on the GDC membrane for local heating. To fabricate the self-supported GDC membrane, the stress of GDC films deposited by pulse laser deposition (PLD) was reduced by controlling partial O2 pressure during deposition. The etch resistance of the GDC film against several chemicals was investigated to design the fabrication process of the micro SOFC. Using the designed fabrication process, the core structure of the micro SOFC was successfully fabricated. The ionic conductivity of the self-supported GDC membrane is approximately identical to that of bulk GDC. The area specific resistivity of the self-supported GDC membrane is as low as 0.15 Ωcm 2 at 500d̀C.

Original languageEnglish
Pages (from-to)524-526
Number of pages3
JournalNihon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B
Issue number751
Publication statusPublished - 2009 Mar


  • Gd-Doped CeO (GDC)
  • Pulsed Laser Deposition
  • Solid Oxide Fuel Cell (SOFC)
  • Thin Solid Electrolyte


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