@inproceedings{0bc222a694db4f3e94c7ce106c8979ed,
title = "Design and fabrication of a terahertz imaging array in 180-nm CMOS process technology",
abstract = "Using terahertz waves for imaging is gaining increased interest. A CMOS cascode amplifier biased near the threshold voltage of a MOSFET for terahertz direct detection is proposed. A test chip composed of 4×4 pixel CMOS terahertz imaging array is designed and fabricated on the basis of a low-cost 180-nm CMOS process technology. Each pixel consists of a microstrip patch antenna, an impedance-matching circuit, and the direct detector. The imaging pixels achieve a responsivity of 51.9 kV/W at 0.915 THz and noise equivalent power (NEP) of 358 pW/Hz1/2 at modulation frequency of 31 Hz. NEP is estimated to be reduced to 33.5 pW/Hz1/2 at 10 kHz. The imaging pixel occupies 250×180 μm. These results suggest that cost-efficient terahertz imaging is possible in the near future.",
keywords = "CMOS, Detector, Direct detection, Envelope detection, Imaging, Microstrip antenna, NEP, On-chip patch antenna, Responsivity, Terahertz, THz",
author = "Kosuke Wakita and Eiichi Sano and Masayuki Ikebe and Stevanus Arnold and Taiichi Otsuji and Yuma Takida and Hiroaki Minamide",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; 21st International Conference on Microwave, Radar and Wireless Communications, MIKON 2016 ; Conference date: 09-05-2016 Through 11-05-2016",
year = "2016",
month = jun,
day = "14",
doi = "10.1109/MIKON.2016.7492053",
language = "English",
series = "2016 21st International Conference on Microwave, Radar and Wireless Communications, MIKON 2016",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "Artur Rydosz",
booktitle = "2016 21st International Conference on Microwave, Radar and Wireless Communications, MIKON 2016",
address = "United States",
}