Design and fabrication of MEMS optical modulators integrated with PhC waveguides

Akio Higo; Satoshi Iwamoto; Masami Ishida; Yasuhiko Arakawa; Hiroyuki Fujita; Hiroshi Toshiyoshi; Akiko Gomyo; Masatoshi Tokushima; Hirohito Yamada

doi:10.1109/OMEMS.2005.1540104

Design and fabrication of MEMS optical modulators integrated with PhC waveguides

Akio Higo, Satoshi Iwamoto, Masami Ishida, Yasuhiko Arakawa, Hiroyuki Fujita, Hiroshi Toshiyoshi, Akiko Gomyo, Masatoshi Tokushima, Hirohito Yamada

ENG - Communications Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

We report the design and fabrication process of MEMS actuators for optical attenuators integrated with two-dimensional photonic crystal waveguide. Fabrication process has been improved from our previous model such that the SOI PhC layer is not delaminated during the sacrificial release in HF. The device was successfully developed and optically tested to obtain 2 dB modulation contrast at an 86V with -27 dB insertion loss.

Original language	English
Title of host publication	IEEE/LEOS Optical MEMS 2005
Subtitle of host publication	International Conference on Optical MEMS and Their Applications
Pages	113-114
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2005.1540104
Publication status	Published - 2005
Event	IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications - Oulu, Finland Duration: 2005 Aug 1 → 2005 Aug 4

Publication series

Name	IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Conference

Conference	IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications
Country/Territory	Finland
City	Oulu
Period	05/8/1 → 05/8/4

Keywords

2-Dimensinal Photonic Crystal Waveguide
Electrostatic Actuators
Optical attenuator

Access to Document

10.1109/OMEMS.2005.1540104

Cite this

Higo, A., Iwamoto, S., Ishida, M., Arakawa, Y., Fujita, H., Toshiyoshi, H., Gomyo, A., Tokushima, M., & Yamada, H. (2005). Design and fabrication of MEMS optical modulators integrated with PhC waveguides. In IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications (pp. 113-114). Article 1540104 (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications). https://doi.org/10.1109/OMEMS.2005.1540104

@inproceedings{c88687576bad4e878a8bc80614e79b1d,

title = "Design and fabrication of MEMS optical modulators integrated with PhC waveguides",

abstract = "We report the design and fabrication process of MEMS actuators for optical attenuators integrated with two-dimensional photonic crystal waveguide. Fabrication process has been improved from our previous model such that the SOI PhC layer is not delaminated during the sacrificial release in HF. The device was successfully developed and optically tested to obtain 2 dB modulation contrast at an 86V with -27 dB insertion loss.",

keywords = "2-Dimensinal Photonic Crystal Waveguide, Electrostatic Actuators, Optical attenuator",

author = "Akio Higo and Satoshi Iwamoto and Masami Ishida and Yasuhiko Arakawa and Hiroyuki Fujita and Hiroshi Toshiyoshi and Akiko Gomyo and Masatoshi Tokushima and Hirohito Yamada",

year = "2005",

doi = "10.1109/OMEMS.2005.1540104",

language = "English",

isbn = "0780392787",

series = "IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications",

pages = "113--114",

booktitle = "IEEE/LEOS Optical MEMS 2005",

note = "IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications ; Conference date: 01-08-2005 Through 04-08-2005",

}

Higo, A, Iwamoto, S, Ishida, M, Arakawa, Y, Fujita, H, Toshiyoshi, H, Gomyo, A, Tokushima, M & Yamada, H 2005, Design and fabrication of MEMS optical modulators integrated with PhC waveguides. in IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications., 1540104, IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, pp. 113-114, IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications, Oulu, Finland, 05/8/1. https://doi.org/10.1109/OMEMS.2005.1540104

Design and fabrication of MEMS optical modulators integrated with PhC waveguides. / Higo, Akio; Iwamoto, Satoshi; Ishida, Masami et al.
IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications. 2005. p. 113-114 1540104 (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Design and fabrication of MEMS optical modulators integrated with PhC waveguides

AU - Higo, Akio

AU - Iwamoto, Satoshi

AU - Ishida, Masami

AU - Arakawa, Yasuhiko

AU - Fujita, Hiroyuki

AU - Toshiyoshi, Hiroshi

AU - Gomyo, Akiko

AU - Tokushima, Masatoshi

AU - Yamada, Hirohito

PY - 2005

Y1 - 2005

N2 - We report the design and fabrication process of MEMS actuators for optical attenuators integrated with two-dimensional photonic crystal waveguide. Fabrication process has been improved from our previous model such that the SOI PhC layer is not delaminated during the sacrificial release in HF. The device was successfully developed and optically tested to obtain 2 dB modulation contrast at an 86V with -27 dB insertion loss.

AB - We report the design and fabrication process of MEMS actuators for optical attenuators integrated with two-dimensional photonic crystal waveguide. Fabrication process has been improved from our previous model such that the SOI PhC layer is not delaminated during the sacrificial release in HF. The device was successfully developed and optically tested to obtain 2 dB modulation contrast at an 86V with -27 dB insertion loss.

KW - 2-Dimensinal Photonic Crystal Waveguide

KW - Electrostatic Actuators

KW - Optical attenuator

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U2 - 10.1109/OMEMS.2005.1540104

DO - 10.1109/OMEMS.2005.1540104

M3 - Conference contribution

AN - SCOPUS:33749055732

SN - 0780392787

SN - 9780780392786

T3 - IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

SP - 113

EP - 114

BT - IEEE/LEOS Optical MEMS 2005

T2 - IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Y2 - 1 August 2005 through 4 August 2005

ER -

Higo A, Iwamoto S, Ishida M, Arakawa Y, Fujita H, Toshiyoshi H et al. Design and fabrication of MEMS optical modulators integrated with PhC waveguides. In IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications. 2005. p. 113-114. 1540104. (IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications). doi: 10.1109/OMEMS.2005.1540104

Design and fabrication of MEMS optical modulators integrated with PhC waveguides

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