Design and fabrication of passive wireless SAW sensor for pressure measurement

Shuhei Hashimoto; Jan H. Kuypers; Shuji Tanaka; Masayoshi Esashi

doi:10.1541/ieejsmas.128.230

Design and fabrication of passive wireless SAW sensor for pressure measurement

Shuhei Hashimoto, Jan H. Kuypers, Shuji Tanaka, Masayoshi Esashi

ENG - Robotics

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

This paper mainly presents the design and fabrication of a TDMA (time division multiple access) passive wireless pressure sensor using 2.45 GHz surface acoustic wave (SAW) delay lines. The SAW pressure sensor consists of two LiNbO₃ substrates. The first layer is a pressure-detective thin substrate, on which an interdigital transducer (IDT) and reflectors are fabricated. The second layer is a support substrate, in which a reference pressure cavity is etched. These two substrates are directly bonded. The pressure measurement was successfully demonstrated in a pressure range of 20-280 kPa with good repeatability. In addition, the influence of a tire on the wireless interrogation of the sensor was investigated. Automobile tires have little negative influence on wireless communication, at least if they do not rotate.

Original language	English
Pages (from-to)	230-234
Number of pages	5
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	128
Issue number	5
DOIs	https://doi.org/10.1541/ieejsmas.128.230
Publication status	Published - 2008

Keywords

Hermetic sealing
Lithium niobate (LiNbO)
Pressure sensor
SAW delay line
Surface acoustic wave (SAW)
Wireless sensor

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10.1541/ieejsmas.128.230

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title = "Design and fabrication of passive wireless SAW sensor for pressure measurement",

abstract = "This paper mainly presents the design and fabrication of a TDMA (time division multiple access) passive wireless pressure sensor using 2.45 GHz surface acoustic wave (SAW) delay lines. The SAW pressure sensor consists of two LiNbO3 substrates. The first layer is a pressure-detective thin substrate, on which an interdigital transducer (IDT) and reflectors are fabricated. The second layer is a support substrate, in which a reference pressure cavity is etched. These two substrates are directly bonded. The pressure measurement was successfully demonstrated in a pressure range of 20-280 kPa with good repeatability. In addition, the influence of a tire on the wireless interrogation of the sensor was investigated. Automobile tires have little negative influence on wireless communication, at least if they do not rotate.",

keywords = "Hermetic sealing, Lithium niobate (LiNbO), Pressure sensor, SAW delay line, Surface acoustic wave (SAW), Wireless sensor",

author = "Shuhei Hashimoto and Kuypers, {Jan H.} and Shuji Tanaka and Masayoshi Esashi",

year = "2008",

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language = "English",

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publisher = "The Institute of Electrical Engineers of Japan",

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T1 - Design and fabrication of passive wireless SAW sensor for pressure measurement

AU - Hashimoto, Shuhei

AU - Kuypers, Jan H.

AU - Tanaka, Shuji

AU - Esashi, Masayoshi

PY - 2008

Y1 - 2008

N2 - This paper mainly presents the design and fabrication of a TDMA (time division multiple access) passive wireless pressure sensor using 2.45 GHz surface acoustic wave (SAW) delay lines. The SAW pressure sensor consists of two LiNbO3 substrates. The first layer is a pressure-detective thin substrate, on which an interdigital transducer (IDT) and reflectors are fabricated. The second layer is a support substrate, in which a reference pressure cavity is etched. These two substrates are directly bonded. The pressure measurement was successfully demonstrated in a pressure range of 20-280 kPa with good repeatability. In addition, the influence of a tire on the wireless interrogation of the sensor was investigated. Automobile tires have little negative influence on wireless communication, at least if they do not rotate.

AB - This paper mainly presents the design and fabrication of a TDMA (time division multiple access) passive wireless pressure sensor using 2.45 GHz surface acoustic wave (SAW) delay lines. The SAW pressure sensor consists of two LiNbO3 substrates. The first layer is a pressure-detective thin substrate, on which an interdigital transducer (IDT) and reflectors are fabricated. The second layer is a support substrate, in which a reference pressure cavity is etched. These two substrates are directly bonded. The pressure measurement was successfully demonstrated in a pressure range of 20-280 kPa with good repeatability. In addition, the influence of a tire on the wireless interrogation of the sensor was investigated. Automobile tires have little negative influence on wireless communication, at least if they do not rotate.

KW - Hermetic sealing

KW - Lithium niobate (LiNbO)

KW - Pressure sensor

KW - SAW delay line

KW - Surface acoustic wave (SAW)

KW - Wireless sensor

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JO - IEEJ Transactions on Sensors and Micromachines

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Design and fabrication of passive wireless SAW sensor for pressure measurement

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