Design and fabrication of photonic MEMS waveguide modulators

Akio Higo; Hiroyuki Fujita; Yoshiaki Nakano; Hiroshi Toshiyoshi

doi:10.1109/OMEMS.2007.4373896

Design and fabrication of photonic MEMS waveguide modulators

Akio Higo, Hiroyuki Fujita, Yoshiaki Nakano, Hiroshi Toshiyoshi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We report the design and fabrication process of photonic MEMS actuators for optical attenuators integrated with a silicon photonic wire waveguide. This paper presents design and theoretical analysis of the silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 100-nm MEMS displacement on a 5-um-wide and 50-um-long cantilever at a voltage of 20pp.

Original language	English
Title of host publication	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Pages	173-174
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2007.4373896
Publication status	Published - 2007 Dec 1
Event	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS - Hualien, Taiwan, Province of China Duration: 2007 Aug 12 → 2007 Aug 16

Publication series

Name	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS

Other

Other	2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS
Country/Territory	Taiwan, Province of China
City	Hualien
Period	07/8/12 → 07/8/16

Keywords

Optical MEMS
Photonic waveguides
Silicon photonic MEMS

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/OMEMS.2007.4373896

Cite this

Design and fabrication of photonic MEMS waveguide modulators. / Higo, Akio; Fujita, Hiroyuki; Nakano, Yoshiaki et al.
2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS. 2007. p. 173-174 4373896 (2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Higo, A, Fujita, H, Nakano, Y & Toshiyoshi, H 2007, Design and fabrication of photonic MEMS waveguide modulators. in 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS., 4373896, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, pp. 173-174, 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OMENS, Hualien, Taiwan, Province of China, 07/8/12. https://doi.org/10.1109/OMEMS.2007.4373896

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abstract = "We report the design and fabrication process of photonic MEMS actuators for optical attenuators integrated with a silicon photonic wire waveguide. This paper presents design and theoretical analysis of the silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 100-nm MEMS displacement on a 5-um-wide and 50-um-long cantilever at a voltage of 20pp.",

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author = "Akio Higo and Hiroyuki Fujita and Yoshiaki Nakano and Hiroshi Toshiyoshi",

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N2 - We report the design and fabrication process of photonic MEMS actuators for optical attenuators integrated with a silicon photonic wire waveguide. This paper presents design and theoretical analysis of the silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 100-nm MEMS displacement on a 5-um-wide and 50-um-long cantilever at a voltage of 20pp.

AB - We report the design and fabrication process of photonic MEMS actuators for optical attenuators integrated with a silicon photonic wire waveguide. This paper presents design and theoretical analysis of the silicon optical waveguide modulator with an electrostatic micromechanical structure actuated in the evanescent range. We observed a 100-nm MEMS displacement on a 5-um-wide and 50-um-long cantilever at a voltage of 20pp.

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Design and fabrication of photonic MEMS waveguide modulators

Abstract

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Keywords

ASJC Scopus subject areas

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