Design and test of dual axis silicon resonant angular rate sensor using electromagnetic excitation and electromagnetic/capacitive detection

Engineering

• Detection 100%
• Capacitive 40%
• Resonant Frequency 40%
• Design 40%
• Testing 40%
• Fabrication 20%
• Using Sensor 20%
• Test Result 20%
• Networks (Circuits) 20%
• Micro-Electro-Mechanical System 20%
• Test Equipment 20%
• Inductive Coupled Plasma 20%
• Electron-Beam Evaporation 20%
• Frequency Difference 20%
• Experiments 20%
• Simulation 20%
• Error 20%
• Maximum Displacement 20%

Physics

• Detection 100%
• Electromagnetism 80%
• Silicon 60%
• Resonant Frequencies 40%
• Frequencies 40%
• Circuits 20%
• Independent Variables 20%
• Simulation 20%
• Fabrication 20%

Material Science

• Bar (Metal) 40%
• Devices 40%
• Sensor 40%
• Device Fabrication 20%
• Wet Etching 20%
• Reactive Ion Etching 20%