Design and verification of an XYZ three-axis micro stage

Keisuke Adachi; Takuma Sugawara; Yuki Shimizu; Yuan Liu Chen; Wei Gao; Eiji Niwa; Yoshihiro Sasaki

Design and verification of an XYZ three-axis micro stage

Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Yuan Liu Chen, Wei Gao, Eiji Niwa, Yoshihiro Sasaki

ENG - Finemechanics

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.

Original language	English
Publication status	Published - 2017 Nov 13
Event	9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 - Hiroshima City, Japan Duration: 2017 Nov 13 → 2017 Nov 17

Conference

Conference	9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017
Country/Territory	Japan
City	Hiroshima City
Period	17/11/13 → 17/11/17

Keywords

Mechatronics
Micro stage
Multi-axis motion
PZT actuator

Cite this

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title = "Design and verification of an XYZ three-axis micro stage",

abstract = "This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.",

keywords = "Mechatronics, Micro stage, Multi-axis motion, PZT actuator",

author = "Keisuke Adachi and Takuma Sugawara and Yuki Shimizu and Chen, {Yuan Liu} and Wei Gao and Eiji Niwa and Yoshihiro Sasaki",

note = "Funding Information: This work was supported by the NSK Foundation's Research Grant for Advancement of Mechatronics (2016-2017) and Japan Society for the Promotion of Science (JSPS).; 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017 ; Conference date: 13-11-2017 Through 17-11-2017",

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TY - CONF

T1 - Design and verification of an XYZ three-axis micro stage

AU - Adachi, Keisuke

AU - Sugawara, Takuma

AU - Shimizu, Yuki

AU - Chen, Yuan Liu

AU - Gao, Wei

AU - Niwa, Eiji

AU - Sasaki, Yoshihiro

N1 - Funding Information: This work was supported by the NSK Foundation's Research Grant for Advancement of Mechatronics (2016-2017) and Japan Society for the Promotion of Science (JSPS).

PY - 2017/11/13

Y1 - 2017/11/13

N2 - This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.

AB - This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf springs acting not only as guides for a stage table but also as precision displacement sensors are included in the stage system. The XYZ three-axis micro stage is designed and fabricated. The fabricated stage is designed to have a small size of 25 mm (X) × 25 mm (Y) × 6.5 mm (Z). Furthermore, feasibility of the driving principle of the developed XYZ three-axis micro stage is verified in experiments.

KW - Mechatronics

KW - Micro stage

KW - Multi-axis motion

KW - PZT actuator

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UR - http://www.scopus.com/inward/citedby.url?scp=85041348441&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:85041348441

T2 - 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017

Y2 - 13 November 2017 through 17 November 2017

ER -

Design and verification of an XYZ three-axis micro stage

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