@inproceedings{52e9cfd154f14c2385e1406fd8dffd32,
title = "Design of a linear-rotary micro-stage",
abstract = "This paper presents a linear-rotary micro-stage that can generate motions along and about the Z-axis using piezoelectric elements (PZTs). The small stroke of a PZT is extended by repeating the PZT motions based on a mechanism of impact friction drive. The friction drive mechanism has a simple driving unit, which only consists of a PZT element and a friction element. The moving element of the stage, which is a steel cylinder, is supported and actuated by a driving unit, which consists of two PZTs and a friction component made by permanent magnet. The magnetic force is employed for holding the moving element and stabilizing the driving condition. The dimension of the stage is 7.0 mm x 8.8 mm x 7.5 mm. The moving ranges of the stage are about 5.0 mm in the Z-direction and 360 degrees in the θ z-direction, respectively. The maximum moving speeds are approximately 30 mm/s and 84 rpm in the two directions, respectively.",
keywords = "PZT, friction drive, linear, micro-stage, precision positioning, rotary, two-axis",
author = "Yuxin Peng and Yasumasa Sakurai and Yoshikazu Arai and Yuki Shimizu and Wei Gao",
year = "2011",
doi = "10.1117/12.904884",
language = "English",
isbn = "9780819479402",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Seventh International Symposium on Precision Engineering Measurements and Instrumentation",
note = "7th International Symposium on Precision Engineering Measurements and Instrumentation ; Conference date: 07-08-2011 Through 11-08-2011",
}