TY - JOUR
T1 - Desorption of propylene glycol monomethyl ether acetate from activated carbon in supercritical CO2
T2 - Measurement and predictive modeling
AU - Ushiki, Ikuo
AU - Tsuji, Hiromu
AU - Takishima, Shigeki
AU - Ito, Yasuyuki
AU - Inomata, Hiroshi
N1 - Funding Information:
This research was financially supported by the Japan Societyfor the Promotion of Science (JSPS) KAKENHI (18K14045).
Funding Information:
This research was financially supported by the Japan Society for the Promotion of Science (JSPS) KAKENHI ( 18K14045).
Publisher Copyright:
© 2020 Elsevier B.V.
PY - 2020/12/1
Y1 - 2020/12/1
N2 - The desorption behavior of propylene glycol monomethyl ether acetate (PGMEA), which is a volatile organic compound (VOC) used in semiconductor manufacturing, from activated carbon (AC) was experimentally and theoretically studied over a wide range of supercritical carbon dioxide (scCO2) conditions at T=(313 K to 353 K) and P=(10.0 MPa to 20.0 MPa) for the design of AC regeneration processes using scCO2. The experimental results reveal that the desorption ratio of PGMEA depended on the density of CO2, and is affected by its chemical structure and diffusivity of the VOC. A kinetic model based on the material balances of the VOC in the bulk phase and adsorption equilibria in the adsorbed phase described by the Dubinin–Astakhov equation was newly proposed to predict the desorption behavior. The model successfully predicted the desorption behavior using parameters determined from adsorption equilibrium and kinetic measurements of PGMEA on AC in scCO2.
AB - The desorption behavior of propylene glycol monomethyl ether acetate (PGMEA), which is a volatile organic compound (VOC) used in semiconductor manufacturing, from activated carbon (AC) was experimentally and theoretically studied over a wide range of supercritical carbon dioxide (scCO2) conditions at T=(313 K to 353 K) and P=(10.0 MPa to 20.0 MPa) for the design of AC regeneration processes using scCO2. The experimental results reveal that the desorption ratio of PGMEA depended on the density of CO2, and is affected by its chemical structure and diffusivity of the VOC. A kinetic model based on the material balances of the VOC in the bulk phase and adsorption equilibria in the adsorbed phase described by the Dubinin–Astakhov equation was newly proposed to predict the desorption behavior. The model successfully predicted the desorption behavior using parameters determined from adsorption equilibrium and kinetic measurements of PGMEA on AC in scCO2.
KW - Activated carbon (AC)
KW - Desorption behavior
KW - Dubinin–Astakhov equation
KW - Propylene glycol monomethyl ether acetate (PGMEA)
KW - Supercritical carbon dioxide
KW - Volatile organic compounds (VOCs)
UR - http://www.scopus.com/inward/record.url?scp=85089945528&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85089945528&partnerID=8YFLogxK
U2 - 10.1016/j.supflu.2020.105018
DO - 10.1016/j.supflu.2020.105018
M3 - Article
AN - SCOPUS:85089945528
SN - 0896-8446
VL - 166
JO - Journal of Supercritical Fluids
JF - Journal of Supercritical Fluids
M1 - 105018
ER -