Detection of trace water vapor using siOx-coated ball SAW sensor

Kosuke Takayanagi; Shingo Akao; Takayuki Yanagisawa; Noritaka Nakaso; Yusuke Tsukahara; Satoshi Hagihara; Toru Oizumi; Nobuo Takeda; Toshihiro Tsuji; Kazushi Yamanaka

doi:10.2320/matertrans.I-M2014807

Detection of trace water vapor using siO_x-coated ball SAW sensor

Kosuke Takayanagi, Shingo Akao, Takayuki Yanagisawa, Noritaka Nakaso, Yusuke Tsukahara, Satoshi Hagihara, Toru Oizumi, Nobuo Takeda, Toshihiro Tsuji, Kazushi Yamanaka

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

In manufacturing process of semiconductor, blue light emitting diode (LED), and lithium ion battery, detection and monitoring of trace water vapor (<1 μmol/mol) are significantly important techniques. We have been researching about detection of trace water vapor with high speed and sensitivity by using ball surface acoustic wave (SAW) sensor. In this paper, we tried to detect trace water vapor by coating silicon oxide (SiOx) on ball SAW sensor using solgel method. It was confirmed that SiOx-coated ball SAW sensor could detect water vapor in a wide range from 95 to 0°C in frost point (0.0356.0

Original language	English
Pages (from-to)	988-993
Number of pages	6
Journal	Materials Transactions
Volume	55
Issue number	7
DOIs	https://doi.org/10.2320/matertrans.I-M2014807
Publication status	Published - 2014

Keywords

Ball surface acoustic wave (SAW) sensor
Hygrometer
Silicon oxide
Solgel method
Trace water vapor

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.2320/matertrans.I-M2014807

Cite this

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abstract = "In manufacturing process of semiconductor, blue light emitting diode (LED), and lithium ion battery, detection and monitoring of trace water vapor (<1 μmol/mol) are significantly important techniques. We have been researching about detection of trace water vapor with high speed and sensitivity by using ball surface acoustic wave (SAW) sensor. In this paper, we tried to detect trace water vapor by coating silicon oxide (SiOx) on ball SAW sensor using solgel method. It was confirmed that SiOx-coated ball SAW sensor could detect water vapor in a wide range from 95 to 0°C in frost point (0.0356.0",

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AU - Takayanagi, Kosuke

AU - Akao, Shingo

AU - Yanagisawa, Takayuki

AU - Nakaso, Noritaka

AU - Tsukahara, Yusuke

AU - Hagihara, Satoshi

AU - Oizumi, Toru

AU - Takeda, Nobuo

AU - Tsuji, Toshihiro

AU - Yamanaka, Kazushi

PY - 2014

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AB - In manufacturing process of semiconductor, blue light emitting diode (LED), and lithium ion battery, detection and monitoring of trace water vapor (<1 μmol/mol) are significantly important techniques. We have been researching about detection of trace water vapor with high speed and sensitivity by using ball surface acoustic wave (SAW) sensor. In this paper, we tried to detect trace water vapor by coating silicon oxide (SiOx) on ball SAW sensor using solgel method. It was confirmed that SiOx-coated ball SAW sensor could detect water vapor in a wide range from 95 to 0°C in frost point (0.0356.0

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