@inproceedings{4818f8cd4efc449d8b12f7fc8bbe1a07,
title = "Determination of full material constants of ScAlN thin film from bulk and leaky Lamb waves in MEMS-based samples",
abstract = "The full material constants of a 40% Sc-AlN thin film were systematically determined. First, 4 kinds of MEMS resonators and a Lamb wave resonator were used to determine the material constants as much as possible. The other unknown material constants together with the material constants which needed more accurate estimation were determined based on ultrasonic microspectroscopy and parameter fitting. The phase velocity versus frequency (v-f) characteristics of A0 and S0 mode leaky Lamb waves in a self-suspended ScAlN film were measured using an ultrasonic microscope, and then theoretical v-f characteristics were fitted to the measured ones by tuning the material constants as parameters.",
keywords = "FEM simulation, MEMS resonator, Parameter fitting, Thin film characterization, Ultrasonic microspectroscopy",
author = "Akira Konno and Michio Kadota and Kushibiki, {Jun Ichi} and Yuji Ohashi and Masayoshi Esashi and Yasuo Yamamoto and Shuji Tanaka",
note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 2014 IEEE International Ultrasonics Symposium, IUS 2014 ; Conference date: 03-09-2014 Through 06-09-2014",
year = "2014",
month = oct,
day = "20",
doi = "10.1109/ULTSYM.2014.0068",
language = "English",
series = "IEEE International Ultrasonics Symposium, IUS",
publisher = "IEEE Computer Society",
pages = "273--276",
booktitle = "IEEE International Ultrasonics Symposium, IUS",
address = "United States",
}