Development of 3D imaging systems using ion microbeams

Shigeo Matsuyama; Taisuke Hatakeyama; Hirotsugu Arai; Yohei Kikuchi; Misako Miwa; Sho Toyama

doi:10.1016/j.nimb.2020.08.020

Development of 3D imaging systems using ion microbeams

Shigeo Matsuyama, Taisuke Hatakeyama, Hirotsugu Arai, Yohei Kikuchi, Misako Miwa, Sho Toyama

ENG - Quantum Science and Energy Engineering

Tohoku University

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Elemental analysis of specimens at the microscale is very important in various fields. To capture a three-dimensional (3D) elemental image, we developed a sequential computed tomography (CT) system comprising particle-induced X-ray emission (PIXE)-micron-CT and PIXE-CT. This system can image samples with sizes ranging from several µm to 1000 µm. We applied this system to capture 3D elemental images of iron (Fe), titanium (Ti) and cesium (Cs) in samples ranging in size from 50 to 100 µm. Ti and Fe were easily measured by both micron-CT and PIXE-CT, and the results obtained were consistent between the two systems.

Original language	English
Pages (from-to)	31-36
Number of pages	6
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	482
DOIs	https://doi.org/10.1016/j.nimb.2020.08.020
Publication status	Published - 2020 Nov 1

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10.1016/j.nimb.2020.08.020

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title = "Development of 3D imaging systems using ion microbeams",

abstract = "Elemental analysis of specimens at the microscale is very important in various fields. To capture a three-dimensional (3D) elemental image, we developed a sequential computed tomography (CT) system comprising particle-induced X-ray emission (PIXE)-micron-CT and PIXE-CT. This system can image samples with sizes ranging from several µm to 1000 µm. We applied this system to capture 3D elemental images of iron (Fe), titanium (Ti) and cesium (Cs) in samples ranging in size from 50 to 100 µm. Ti and Fe were easily measured by both micron-CT and PIXE-CT, and the results obtained were consistent between the two systems.",

author = "Shigeo Matsuyama and Taisuke Hatakeyama and Hirotsugu Arai and Yohei Kikuchi and Misako Miwa and Sho Toyama",

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T1 - Development of 3D imaging systems using ion microbeams

AU - Matsuyama, Shigeo

AU - Hatakeyama, Taisuke

AU - Arai, Hirotsugu

AU - Kikuchi, Yohei

AU - Miwa, Misako

AU - Toyama, Sho

PY - 2020/11/1

Y1 - 2020/11/1

N2 - Elemental analysis of specimens at the microscale is very important in various fields. To capture a three-dimensional (3D) elemental image, we developed a sequential computed tomography (CT) system comprising particle-induced X-ray emission (PIXE)-micron-CT and PIXE-CT. This system can image samples with sizes ranging from several µm to 1000 µm. We applied this system to capture 3D elemental images of iron (Fe), titanium (Ti) and cesium (Cs) in samples ranging in size from 50 to 100 µm. Ti and Fe were easily measured by both micron-CT and PIXE-CT, and the results obtained were consistent between the two systems.

AB - Elemental analysis of specimens at the microscale is very important in various fields. To capture a three-dimensional (3D) elemental image, we developed a sequential computed tomography (CT) system comprising particle-induced X-ray emission (PIXE)-micron-CT and PIXE-CT. This system can image samples with sizes ranging from several µm to 1000 µm. We applied this system to capture 3D elemental images of iron (Fe), titanium (Ti) and cesium (Cs) in samples ranging in size from 50 to 100 µm. Ti and Fe were easily measured by both micron-CT and PIXE-CT, and the results obtained were consistent between the two systems.

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ER -

Development of 3D imaging systems using ion microbeams

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