Development of a cryogenic stage for an ion-milling instrument

Masami Terauchi, Futami Satou, Hideo Sugizaki, Katsuaki Suganuma

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


A specimen-cooling device has been designed, manufactured and integrated into a commercial ion-milling instrument for transmission electron microscopy. The instrument enables us to prepare section specimens of tin-plated Cu without forming intermetallic compound particles and/or voids. The results show that cooling of specimen during ion-milling process is necessary for fine structure investigations of low melting temperature materials.

Original languageEnglish
Pages (from-to)25-27
Number of pages3
JournalJournal of Electron Microscopy
Issue number1
Publication statusPublished - 2011 Feb


  • cooling stage
  • ion-milling
  • Sn-plating


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