Development of a cryogenic stage for an ion-milling instrument

Masami Terauchi; Futami Satou; Hideo Sugizaki; Katsuaki Suganuma

doi:10.1093/jmicro/dfq069

Development of a cryogenic stage for an ion-milling instrument

Masami Terauchi, Futami Satou, Hideo Sugizaki, Katsuaki Suganuma

IMRAM - Division of Measurements

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A specimen-cooling device has been designed, manufactured and integrated into a commercial ion-milling instrument for transmission electron microscopy. The instrument enables us to prepare section specimens of tin-plated Cu without forming intermetallic compound particles and/or voids. The results show that cooling of specimen during ion-milling process is necessary for fine structure investigations of low melting temperature materials.

Original language	English
Pages (from-to)	25-27
Number of pages	3
Journal	Journal of Electron Microscopy
Volume	60
Issue number	1
DOIs	https://doi.org/10.1093/jmicro/dfq069
Publication status	Published - 2011 Feb

Keywords

cooling stage
ion-milling
Sn-plating

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10.1093/jmicro/dfq069

Cite this

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abstract = "A specimen-cooling device has been designed, manufactured and integrated into a commercial ion-milling instrument for transmission electron microscopy. The instrument enables us to prepare section specimens of tin-plated Cu without forming intermetallic compound particles and/or voids. The results show that cooling of specimen during ion-milling process is necessary for fine structure investigations of low melting temperature materials.",

keywords = "cooling stage, ion-milling, Sn-plating",

author = "Masami Terauchi and Futami Satou and Hideo Sugizaki and Katsuaki Suganuma",

note = "Funding Information: Present developments of the cooling device were partly supported by Materials Science & Technology Research Center for Industrial Creation (2005.4– 2010.3) funded by the Ministry of Education, Culture, Sports, Science and Technology of Japan.",

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AU - Sugizaki, Hideo

AU - Suganuma, Katsuaki

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AB - A specimen-cooling device has been designed, manufactured and integrated into a commercial ion-milling instrument for transmission electron microscopy. The instrument enables us to prepare section specimens of tin-plated Cu without forming intermetallic compound particles and/or voids. The results show that cooling of specimen during ion-milling process is necessary for fine structure investigations of low melting temperature materials.

KW - cooling stage

KW - ion-milling

KW - Sn-plating

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Development of a cryogenic stage for an ion-milling instrument

Abstract

Keywords

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