Development of a dielectric barrier discharge (DBD) cryo-microplasma: Generation and diagnostics

Daisuke Ishihara, Yuri Noma, Sven Stauss, Masaki Sai, Takaaki Tomai, Kazuo Terashima

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31 Citations (Scopus)


We developed a cryo-microplasma, which can continuously control gas temperature below room temperature and below the freezing point of water. To develop the cryo-microplasma, we first developed an atmospheric-pressure low-temperature microplasma that can suppress the increase in its gas temperature. Helium gas was employed, which was generated in open air. The average estimated electron density and temperature were 108-10 9 cm-3 and 4-5 eV, respectively, independent of the applied voltage. Then, helium gas, which was the working gas of the atmospheric-pressure low-temperature microplasma, was cooled by liquid nitrogen to generate an atmospheric-pressure cryo-microplasma in open air. We observed the generation of frost around the quartz tube in which the plasma was generated and an increase in atomic oxygen emission by optical emission spectroscopy. Finally, to avoid the generation of frost, a cryo-microplasma was generated in a reactor chamber separated from open air. Helium, nitrogen and oxygen were employed as working gases. Using thermocouples and by estimation from the nitrogen rotational temperature, we verified that the gas temperature of the cryo-microplasma was much lower (Tg ≈ 180-300 K) than that of the conventional atmospheric-pressure low-temperature plasma (above 300 K).

Original languageEnglish
Article number035008
JournalPlasma Sources Science and Technology
Issue number3
Publication statusPublished - 2008 Aug 1


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