Development of a dielectric-barrier discharge enhanced microplasma jet

Shinya Kiriu; Hiroyuki Miyazoe; Fumitoshi Takamine; Masaki Sai; Jai Hyuk Choi; Takaaki Tomai; Kazuo Terashima

doi:10.1063/1.3130183

Development of a dielectric-barrier discharge enhanced microplasma jet

Shinya Kiriu, Hiroyuki Miyazoe, Fumitoshi Takamine, Masaki Sai, Jai Hyuk Choi, Takaaki Tomai, Kazuo Terashima

FRIS - Advanced Interdisciplinary Research Division

The University of Tokyo

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated and its sustainability was independent of the gas flow rate. This plasma jet had a longer plume than that of a thermoelectron-enhanced microplasma jet, and time-resolved characterization suggested interactions between ICMP and DBD jets. By optical emission spectroscopy characterization, the gas temperature and electron density inside a capillary were estimated to be 400-1000 K and 10 ¹³ - 10¹⁴ cm^-3, respectively.

Original language	English
Article number	191502
Journal	Applied Physics Letters
Volume	94
Issue number	19
DOIs	https://doi.org/10.1063/1.3130183
Publication status	Published - 2009

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abstract = "A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated and its sustainability was independent of the gas flow rate. This plasma jet had a longer plume than that of a thermoelectron-enhanced microplasma jet, and time-resolved characterization suggested interactions between ICMP and DBD jets. By optical emission spectroscopy characterization, the gas temperature and electron density inside a capillary were estimated to be 400-1000 K and 10 13 - 1014 cm-3, respectively.",

author = "Shinya Kiriu and Hiroyuki Miyazoe and Fumitoshi Takamine and Masaki Sai and Choi, {Jai Hyuk} and Takaaki Tomai and Kazuo Terashima",

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AU - Kiriu, Shinya

AU - Miyazoe, Hiroyuki

AU - Takamine, Fumitoshi

AU - Sai, Masaki

AU - Choi, Jai Hyuk

AU - Tomai, Takaaki

AU - Terashima, Kazuo

N1 - Funding Information: This work was supported financially in part by Specific Research of Priority Areas (Microplasma) (Grant No. 15075202) from the Ministry of Education, Culture, Sports, Science and Technology, Japan.

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AB - A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated and its sustainability was independent of the gas flow rate. This plasma jet had a longer plume than that of a thermoelectron-enhanced microplasma jet, and time-resolved characterization suggested interactions between ICMP and DBD jets. By optical emission spectroscopy characterization, the gas temperature and electron density inside a capillary were estimated to be 400-1000 K and 10 13 - 1014 cm-3, respectively.

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Development of a dielectric-barrier discharge enhanced microplasma jet

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