TY - JOUR
T1 - Development of a nanostructural microwave probe based on GaAs
AU - Ju, Y.
AU - Kobayashi, T.
AU - Soyama, H.
N1 - Funding Information:
This work was supported by the Japan Society for the Promotion of Science under Grant-in-Aid for Scientific Research (S) 18106003 and (A) 17206011; Ministry of Education, Culture, Sports, Science and Technology of Japan under Grant-in-Aid Exploratory Research 18656034.
PY - 2008/7
Y1 - 2008/7
N2 - In order to develop a new structural microwave probe, we studied the fabrication of an AFM probe on a GaAs wafer. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe where a tip 7 μm high with a 2.0 aspect ratio was formed and the dimensions of the cantilever were 250 × 30 × 15 μm. The open structure of the waveguide at the tip of the probe was obtained by FIB fabrication. An AFM image and profile analysis for a standard sample, obtained by the fabricated GaAs microwave probe and a commercial Si AFM probe, indicate that the fabricated probe has a similar capability for measurement of material topography as compared to the commercial probe.
AB - In order to develop a new structural microwave probe, we studied the fabrication of an AFM probe on a GaAs wafer. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe where a tip 7 μm high with a 2.0 aspect ratio was formed and the dimensions of the cantilever were 250 × 30 × 15 μm. The open structure of the waveguide at the tip of the probe was obtained by FIB fabrication. An AFM image and profile analysis for a standard sample, obtained by the fabricated GaAs microwave probe and a commercial Si AFM probe, indicate that the fabricated probe has a similar capability for measurement of material topography as compared to the commercial probe.
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U2 - 10.1007/s00542-007-0484-0
DO - 10.1007/s00542-007-0484-0
M3 - Article
AN - SCOPUS:44249113344
SN - 0946-7076
VL - 14
SP - 1021
EP - 1025
JO - Microsystem Technologies
JF - Microsystem Technologies
IS - 7
ER -