Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements

Toshihiro Takeshita; Takuma Iwasaki; Kota Harisaki; Hideyuki Ando; Eiji Higurashi; Renshi Sawada

Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements

Toshihiro Takeshita, Takuma Iwasaki, Kota Harisaki, Hideyuki Ando, Eiji Higurashi, Renshi Sawada

Research output: Contribution to journal › Article › peer-review

Abstract

We fabricated a mechanical stage driven by a piezoelectric actuator and built in a microdisplacement sensor, which is used to decrease the effect of hysteresis and creep in the piezoelectric actuator. The displacement sensor consists of a vertical-cavity surface-emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PD_s), a frame, and a cover glass. The size of the sensor chip is 3.0 mm by 3.0 mm with a thickness of 0.7 mm. The maximum variation in the position of the mechanical stage caused by hysteresis is 7.5 μm without control when the movement range of the mechanical stage is 84.4 μm. By controlling the applied voltage using our microdisplacement sensor, we reduce the effect of the hysteresis, and the variation in position decreased to 1.9 μm.

Original language	English
Pages (from-to)	547-557
Number of pages	11
Journal	Sensors and Materials
Volume	26
Issue number	8
Publication status	Published - 2014
Externally published	Yes

Keywords

Displacement sensor
Hysteresis
Optical sensor
Piezoelectric actuator
Position control

ASJC Scopus subject areas

Instrumentation
Materials Science(all)

Cite this

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title = "Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements",

abstract = "We fabricated a mechanical stage driven by a piezoelectric actuator and built in a microdisplacement sensor, which is used to decrease the effect of hysteresis and creep in the piezoelectric actuator. The displacement sensor consists of a vertical-cavity surface-emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame, and a cover glass. The size of the sensor chip is 3.0 mm by 3.0 mm with a thickness of 0.7 mm. The maximum variation in the position of the mechanical stage caused by hysteresis is 7.5 μm without control when the movement range of the mechanical stage is 84.4 μm. By controlling the applied voltage using our microdisplacement sensor, we reduce the effect of the hysteresis, and the variation in position decreased to 1.9 μm.",

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T1 - Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements

AU - Takeshita, Toshihiro

AU - Iwasaki, Takuma

AU - Harisaki, Kota

AU - Ando, Hideyuki

AU - Higurashi, Eiji

AU - Sawada, Renshi

PY - 2014

Y1 - 2014

N2 - We fabricated a mechanical stage driven by a piezoelectric actuator and built in a microdisplacement sensor, which is used to decrease the effect of hysteresis and creep in the piezoelectric actuator. The displacement sensor consists of a vertical-cavity surface-emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame, and a cover glass. The size of the sensor chip is 3.0 mm by 3.0 mm with a thickness of 0.7 mm. The maximum variation in the position of the mechanical stage caused by hysteresis is 7.5 μm without control when the movement range of the mechanical stage is 84.4 μm. By controlling the applied voltage using our microdisplacement sensor, we reduce the effect of the hysteresis, and the variation in position decreased to 1.9 μm.

AB - We fabricated a mechanical stage driven by a piezoelectric actuator and built in a microdisplacement sensor, which is used to decrease the effect of hysteresis and creep in the piezoelectric actuator. The displacement sensor consists of a vertical-cavity surface-emitting laser (VCSEL), eight two-dimensional monolithically integrated photodiodes (PDs), a frame, and a cover glass. The size of the sensor chip is 3.0 mm by 3.0 mm with a thickness of 0.7 mm. The maximum variation in the position of the mechanical stage caused by hysteresis is 7.5 μm without control when the movement range of the mechanical stage is 84.4 μm. By controlling the applied voltage using our microdisplacement sensor, we reduce the effect of the hysteresis, and the variation in position decreased to 1.9 μm.

KW - Displacement sensor

KW - Hysteresis

KW - Optical sensor

KW - Piezoelectric actuator

KW - Position control

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Development of a piezo-driven mechanical stage integrated microdisplacement sensor for calibration of displacements

Abstract

Keywords

ASJC Scopus subject areas

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