Development of a secondary electron energy analyzer for a transmission electron microscope

Hideyuki Magara; Takeshi Tomita; Yukihito Kondo; Takafumi Sato; Zentaro Akase; Daisuke Shindo

doi:10.1093/jmicro/dfx126

Development of a secondary electron energy analyzer for a transmission electron microscope

Hideyuki Magara, Takeshi Tomita, Yukihito Kondo, Takafumi Sato, Zentaro Akase, Daisuke Shindo

Research output: Contribution to journal › Article › peer-review

Abstract

A secondary electron (SE) energy analyzer was developed for a transmission electron microscope. The analyzer comprises a microchannel plate (MCP) for detecting electrons, a coil for collecting SEs emitted from the specimen, a tube for reducing the number of backscattered electrons incident on the MCP, and a retarding mesh for selecting the energy of SEs incident on the MCP. The detection of the SEs associated with charging phenomena around a charged specimen was attempted by performing electron holography and SE spectroscopy using the energy analyzer. The results suggest that it is possible to obtain the energy spectra of SEs using the analyzer and the charging states of a specimen by electron holography simultaneously.

Original language	English
Pages (from-to)	121-124
Number of pages	4
Journal	Microscopy
Volume	67
Issue number	2
DOIs	https://doi.org/10.1093/jmicro/dfx126
Publication status	Published - 2018 Apr 1

Keywords

Charging
Electric field
Electron holography
Secondary electron spectroscopy

ASJC Scopus subject areas

Structural Biology
Instrumentation
Radiology Nuclear Medicine and imaging

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10.1093/jmicro/dfx126

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title = "Development of a secondary electron energy analyzer for a transmission electron microscope",

abstract = "A secondary electron (SE) energy analyzer was developed for a transmission electron microscope. The analyzer comprises a microchannel plate (MCP) for detecting electrons, a coil for collecting SEs emitted from the specimen, a tube for reducing the number of backscattered electrons incident on the MCP, and a retarding mesh for selecting the energy of SEs incident on the MCP. The detection of the SEs associated with charging phenomena around a charged specimen was attempted by performing electron holography and SE spectroscopy using the energy analyzer. The results suggest that it is possible to obtain the energy spectra of SEs using the analyzer and the charging states of a specimen by electron holography simultaneously.",

keywords = "Charging, Electric field, Electron holography, Secondary electron spectroscopy",

author = "Hideyuki Magara and Takeshi Tomita and Yukihito Kondo and Takafumi Sato and Zentaro Akase and Daisuke Shindo",

note = "Funding Information: This work was supported by Japan Society for the Promotion of Science (JSPS) Grant-in-Aid for Scientific Research (A) Grant Number JP25249093. Funding Information: The authors thank Dr Y. Murakami, Kyushu University and Mr M. Ageishi, Tohoku University for useful discussions. This work was supported by Japan Society for the Promotion of Science (JSPS) Grant-in-Aid for Scientific Research (A) Grant Number JP25249093. Publisher Copyright: {\textcopyright} The Author(s) 2018. Published by Oxford University Press on behalf of The Japanese Society of Microscopy. All rights reserved.",

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doi = "10.1093/jmicro/dfx126",

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AU - Magara, Hideyuki

AU - Tomita, Takeshi

AU - Kondo, Yukihito

AU - Sato, Takafumi

AU - Akase, Zentaro

AU - Shindo, Daisuke

N1 - Funding Information: This work was supported by Japan Society for the Promotion of Science (JSPS) Grant-in-Aid for Scientific Research (A) Grant Number JP25249093. Funding Information: The authors thank Dr Y. Murakami, Kyushu University and Mr M. Ageishi, Tohoku University for useful discussions. This work was supported by Japan Society for the Promotion of Science (JSPS) Grant-in-Aid for Scientific Research (A) Grant Number JP25249093. Publisher Copyright: © The Author(s) 2018. Published by Oxford University Press on behalf of The Japanese Society of Microscopy. All rights reserved.

PY - 2018/4/1

Y1 - 2018/4/1

N2 - A secondary electron (SE) energy analyzer was developed for a transmission electron microscope. The analyzer comprises a microchannel plate (MCP) for detecting electrons, a coil for collecting SEs emitted from the specimen, a tube for reducing the number of backscattered electrons incident on the MCP, and a retarding mesh for selecting the energy of SEs incident on the MCP. The detection of the SEs associated with charging phenomena around a charged specimen was attempted by performing electron holography and SE spectroscopy using the energy analyzer. The results suggest that it is possible to obtain the energy spectra of SEs using the analyzer and the charging states of a specimen by electron holography simultaneously.

AB - A secondary electron (SE) energy analyzer was developed for a transmission electron microscope. The analyzer comprises a microchannel plate (MCP) for detecting electrons, a coil for collecting SEs emitted from the specimen, a tube for reducing the number of backscattered electrons incident on the MCP, and a retarding mesh for selecting the energy of SEs incident on the MCP. The detection of the SEs associated with charging phenomena around a charged specimen was attempted by performing electron holography and SE spectroscopy using the energy analyzer. The results suggest that it is possible to obtain the energy spectra of SEs using the analyzer and the charging states of a specimen by electron holography simultaneously.

KW - Charging

KW - Electric field

KW - Electron holography

KW - Secondary electron spectroscopy

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Development of a secondary electron energy analyzer for a transmission electron microscope

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Keywords

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