Abstract
A three-electrode-lens drift tube for time-of-flight mass spectrometry (TOP-MS) has been developed for utilizing a detector to observe photon-stimulated desorption (PSD). In spite of a small detection area, the detector has a high detection efficiency and durability to reactive gas atmosphere at high pressure. The TOF-MS performance of the drift tube was examined for PSD using single-bunch-mode synchrotron radiation on a dichlorosilane (SiH2Cl2)-saturated Si(001) surface. The measured acceleration and focusing-voltage dependences of the time of flight, intensity and full width at half-maximum for the peak of H+ and Cl+ PSD ions are discussed in terms of the numerical calculations of ion trajectories and focusing characteristic of the drift tube.
Original language | English |
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Pages (from-to) | 612-614 |
Number of pages | 3 |
Journal | Journal of Synchrotron Radiation |
Volume | 5 |
Issue number | 3 |
DOIs | |
Publication status | Published - 1998 May 1 |
Keywords
- Dichlorosilane
- Drift tubes
- Lens
- PSD
- Si(001)
- Spectrometry
- Time-of-flight mass