TY - JOUR
T1 - Development of an array of compound refractive lenses for sub-pixel resolution, large field of view, and time-saving in scanning hard x-ray microscopy
AU - Mamyrbayev, Talgat
AU - Opolka, Alexander
AU - Ershov, Alexey
AU - Gutekunst, Josephine
AU - Meyer, Pascal
AU - Ikematsu, Katsumasa
AU - Momose, Atsushi
AU - Last, Arndt
N1 - Funding Information:
Acknowledgments: We thank Diamond B16 for the beam time provided and Fox, O. and Sawhney, K. For their kind support at the beamline. The research leading to this result has been supported by the project CALIPSOplus under Grant Agreement 730872 from the EU Framework Program for Research and Innovation HORIZON 2020. The authors acknowledge the support of the Karlsruhe Nano Micro Facility (KNMF), a Helmholtz Research Infrastructure at Karlsruhe Institute of Technology, and the Karlsruhe School of Optics and Photonics (KSOP). We acknowledge support by the KIT-Publication Fund of the Karlsruhe Institute of Technology.
Funding Information:
This research was funded by Exploratory Research for Advanced Technology (ERATO), grant number JPMJER1403. We thank Diamond B16 for the beam time provided and Fox, O. and Sawhney, K. For their kind support at the beamline. The research leading to this result has been supported by the project CALIPSOplus under Grant Agreement 730872 from the EU Framework Program for Research and Innovation HORIZON 2020. The authors acknowledge the support of the Karlsruhe Nano Micro Facility (KNMF), a Helmholtz Research Infrastructure at Karlsruhe Institute of Technology, and the Karlsruhe School of Optics and Photonics (KSOP). We acknowledge support by the KIT-Publication Fund of the Karlsruhe Institute of Technology.
Funding Information:
Funding: This research was funded by Exploratory Research for Advanced Technology (ERATO), grant number JPMJER1403.
Publisher Copyright:
© 2020 by the authors.
PY - 2020/6/1
Y1 - 2020/6/1
N2 - A two-dimensional array of compound refractive lenses (2D array of CRLs) designed for hard X-ray imaging with a 3.5 mm2 large field of view is presented. The array of CRLs consists of 2D polymer biconcave parabolic 34 x 34 multi-lenses fabricated via deep X-ray lithography. The developed refractive multi-lens array was applied for sub-pixel resolution scanning transmission X-ray microscopy; a raster scan with only 55 x 55 steps provides a 3.5 megapixel image. The optical element was experimentally characterized at the Diamond Light Source at 34 keV. An array of point foci with a 55 μmperiod and an average size of ca. 2.1 μmx 3.6 μmwas achieved. In comparison with the conventional scanning transmission microscopy using one CRL, sub-pixel resolution scanning transmission hard X-ray microscopy enables a large field of view and short scanning time while keeping the high spatial resolution.
AB - A two-dimensional array of compound refractive lenses (2D array of CRLs) designed for hard X-ray imaging with a 3.5 mm2 large field of view is presented. The array of CRLs consists of 2D polymer biconcave parabolic 34 x 34 multi-lenses fabricated via deep X-ray lithography. The developed refractive multi-lens array was applied for sub-pixel resolution scanning transmission X-ray microscopy; a raster scan with only 55 x 55 steps provides a 3.5 megapixel image. The optical element was experimentally characterized at the Diamond Light Source at 34 keV. An array of point foci with a 55 μmperiod and an average size of ca. 2.1 μmx 3.6 μmwas achieved. In comparison with the conventional scanning transmission microscopy using one CRL, sub-pixel resolution scanning transmission hard X-ray microscopy enables a large field of view and short scanning time while keeping the high spatial resolution.
KW - Deep X-ray lithography
KW - Scanning transmission X-raymicroscopy
KW - Sub-pixel resolution
KW - Two-dimensional compound refractive lens array
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U2 - 10.3390/APP10124132
DO - 10.3390/APP10124132
M3 - Article
AN - SCOPUS:85087641044
SN - 2076-3417
VL - 10
SP - 1
EP - 9
JO - Applied Sciences (Switzerland)
JF - Applied Sciences (Switzerland)
IS - 12
M1 - 4132
ER -