Abstract
This paper presents the development of an integral optics system for a slim optical mouse whose operation principle in light propagation is based on total internal refection to prevent image distortion. The slim optical mouse can be applied to a portable electric device which has been becoming thinner and smaller and has a variety of functions for entertainment applications. The integral optics system was designed as a combination of an illumination system with a reflector and refractor, an object system, and a lens system with array multilevel lenses for a slim optical mouse with the thickness of 2.5 mm. Fabrications were performed on photo and EB lithography, thermal evaporation by shadowing effect, FAB etching, TMAH etching, and hot embossing. The results show that this system is quite appropriate for a slim optical mouse with the measuring image performance through the lens system and light efficiency traveling to the object plane through the illumination system.
| Original language | English |
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| Pages (from-to) | 1422-1427 |
| Number of pages | 6 |
| Journal | Journal of Vacuum Science and Technology B |
| Volume | 27 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2009 |