TY - GEN
T1 - Development of an optical angle sensor with a mode-locked femtosecond laser source for surface profile measurement
AU - Shimizu, Yuki
AU - Takazono, Shota
AU - Kanda, Yuri
AU - Matsukuma, Hiraku
AU - Gao, Wei
AU - Inaba, Hajime
N1 - Funding Information:
This work was supported by the Japan Society for Promotion of Science (JSPS) Grant Number 18H01345.
Publisher Copyright:
Copyright © 2020 JSME. Published with permission.
PY - 2020
Y1 - 2020
N2 - Angle sensors based on the laser autocollimation are often employed to evaluate surface profiles of a target of interest. The authors have developed a femtosecond laser angle sensor, in which a spectrometer or an optical spectrum analyzer with a single-mode fiber is employed as the photodetector for simultaneous capturing of the multiple optical modes. In this paper, the concept of the femtosecond laser angle sensor is applied to evaluate the surface profile of a target of interest. An optical setup is designed in such a way that each mode in the spectrum of the mode-locked femtosecond is utilized as the laser beam to measure the local slope of a measurement target at each different point to evaluate the surface profile. Some basic experiments are carried out by using the developed optical setup with a mode-locked femtosecond laser source to evaluate basic performances of the developed optical setup as an optical angle sensor.
AB - Angle sensors based on the laser autocollimation are often employed to evaluate surface profiles of a target of interest. The authors have developed a femtosecond laser angle sensor, in which a spectrometer or an optical spectrum analyzer with a single-mode fiber is employed as the photodetector for simultaneous capturing of the multiple optical modes. In this paper, the concept of the femtosecond laser angle sensor is applied to evaluate the surface profile of a target of interest. An optical setup is designed in such a way that each mode in the spectrum of the mode-locked femtosecond is utilized as the laser beam to measure the local slope of a measurement target at each different point to evaluate the surface profile. Some basic experiments are carried out by using the developed optical setup with a mode-locked femtosecond laser source to evaluate basic performances of the developed optical setup as an optical angle sensor.
KW - Femtosecond laser
KW - Laser autocollimation
KW - Optical angle sensor
KW - Single-mode fiber
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U2 - 10.1115/LEMP2020-8501
DO - 10.1115/LEMP2020-8501
M3 - Conference contribution
AN - SCOPUS:85100949854
T3 - JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020
BT - JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020
PB - American Society of Mechanical Engineers
T2 - JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing, LEMP 2020
Y2 - 3 September 2020
ER -